Room temperature platinum telluride array terahertz detector and its preparation method

A technology of terahertz detectors and platinum telluride, applied in the field of terahertz detectors, can solve the problems of limited, single component of terahertz detectors, unrealized large area, controllable thickness, etc., and achieve high-sensitivity detection, The effect of little environmental pollution

Active Publication Date: 2022-03-15
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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Problems solved by technology

[0005] Currently based on PtTe 2 The research on the terahertz detectors is a single component, and the large-area and thickness-controllable PtTe has not been realized. 2 The preparation of materials, as well as the preparation of its terahertz array devices, make it limited in practical applications

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  • Room temperature platinum telluride array terahertz detector and its preparation method
  • Room temperature platinum telluride array terahertz detector and its preparation method
  • Room temperature platinum telluride array terahertz detector and its preparation method

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preparation example Construction

[0045] Participate figure 2 As shown, the present invention also discloses a preparation method of a ventricular temperature calcunoamide array tortz detector, including:

[0046] S1, provide a substrate;

[0047] S2, prepared oxide layer by thermal oxidation method on the substrate;

[0048] S3, the array-distributed ruthenium telluride channel layer is prepared on the oxide layer;

[0049] S4, an electrode layer of the array distribution is prepared on the oxide layer and a portion of the platinum tank layer.

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Abstract

The invention discloses a room-temperature platinum telluride array terahertz detector and a preparation method thereof. The detector includes a substrate, an oxide layer on the substrate, and a platinum telluride channel layer on the oxide layer distributed in an array , and an electrode layer distributed in an array on the oxide layer and part of the platinum telluride channel layer, the terahertz detector realizes the effective detection of terahertz waves based on the type II Dirac semimetal characteristic of platinum telluride. The terahertz detector of the present invention utilizes the excellent physical properties of platinum telluride to realize high-speed and high-sensitivity detection of terahertz waves at room temperature.

Description

Technical field [0001] The present invention belongs to the field of terahertz detectors, and in particular, the present invention relates to a ventricular temperature cycltiposoxylideramine array terahertz detector and a preparation method thereof. Background technique [0002] Terrahertz (THZ) radiation usually refers to a wavelength at 30 μm ~ 3mm (0.1 THz ~ 10 THz), electromagnetic wave between millimeters and infrared waves, in electrical direction photonology, macro classic theory to micro quantum theory Transition area. The high transmittance, low energy, fingerprint characteristics, and high frequency high bandwidth characteristics, etc. of the terahertz wave make it in non-destructive detection, safety testing, medical imaging, near field micro, spatial imaging, environmental testing, and information communications. Important application. [0003] Aiming at the application of Thetz technology, the core device is a high-performance solid-state terahertz detector. In 1993,...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/032H01L31/0224H01L31/113H01L31/18G01J1/42
CPCH01L31/032H01L31/022408H01L31/113H01L31/18G01J1/42Y02P70/50
Inventor 张凯董卓于文治
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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