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Method and device for processing wafer yield data

A technology of wafer yield rate and data, applied in the direction of electrical digital data processing, input/output process of data processing, instruments, etc., can solve problems such as inability to process wafer yield rate data, achieve the purpose and advantages of simple and easy to understand Effect

Active Publication Date: 2022-07-12
SEMITRONIX
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The embodiment of the present application provides a method and device for wafer yield data processing, so as to at least solve the problem that the wafer yield data cannot be processed in the related art

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  • Method and device for processing wafer yield data
  • Method and device for processing wafer yield data
  • Method and device for processing wafer yield data

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Embodiment Construction

[0052] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be described and illustrated below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application. In addition, it will also be appreciated that while such development efforts may be complex and lengthy, for those of ordinary skill in the art to which the present disclosure pertains, the techniques disclosed in this application Some changes in design, manufacture or production based on the content are only conventional technical means, and it should not be understood that ...

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Abstract

The present application relates to a method and apparatus for processing wafer yield data, wherein the method includes: displaying a master display component and at least one slave display component in a data visualization interface, wherein the master display component includes A graph component showing the trend of wafer yield and / or yield-related parameters in the data dimension; in response to a user's screening operation on at least one data dimension in the graph component, the screened data range is obtained; it is determined that the data range is respectively in corresponding data results in the master display component and the at least one slave display component; respectively adjusting the display results in the master display component and the at least one slave display component according to the data results.

Description

technical field [0001] The present application relates to the technical field of semiconductor data processing, and in particular, to a method and device for processing wafer yield data. Background technique [0002] Chips are cut vertically and horizontally from the wafer. Depending on the size of the chip, hundreds of thousands or even tens of thousands of chips can be cut from a single wafer. Only the effective chips that can meet the design performance and functional requirements can be delivered for use; effective The proportion of chips to the total number of chips on a wafer is called yield or yield. The higher the yield, the higher the commercial value of a wafer. If the yield is low, it means that the manufacturing process is not yet mature, and the product cannot enter mass production. The key to improving the chip yield lies in the complete and effective monitoring and inspection of the manufacturing process, and at the same time, combined with other data in the...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06F3/0481G06F3/04847
CPCG06F3/0481G06F3/04847Y02P90/30
Inventor 杨文浩邵康鹏
Owner SEMITRONIX