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Wafer yield data processing method and device

A technology of wafer yield rate and processing method, applied in the direction of electrical digital data processing, input/output process of data processing, instruments, etc., can solve problems such as inability to process wafer yield rate data, and achieve the purpose and advantages of being concise and easy to understand Effect

Active Publication Date: 2022-04-26
SEMITRONIX
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The embodiment of the present application provides a method and device for wafer yield data processing, so as to at least solve the problem that the wafer yield data cannot be processed in the related art

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  • Wafer yield data processing method and device
  • Wafer yield data processing method and device
  • Wafer yield data processing method and device

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Embodiment Construction

[0052] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be described and illustrated below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application. In addition, it can also be understood that although such development efforts may be complex and lengthy, for those of ordinary skill in the art relevant to the content disclosed in this application, the technology disclosed in this application Some design, manufacturing or production changes based on the content are just conventional technical means, and...

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Abstract

The invention relates to a wafer yield data processing method and device.The method comprises the steps that a main display assembly and at least one slave display assembly are displayed in a data visualization interface, and the main display assembly comprises a chart assembly capable of displaying the wafer yield and / or the yield related parameter trend in multiple data dimensions; in response to a screening operation of a user on at least one data dimension in the chart component, obtaining a screened data range; determining corresponding data results of the data range in the main display component and the at least one slave display component; and respectively adjusting display results in the main display component and the at least one slave display component according to the data result.

Description

technical field [0001] The present application relates to the technical field of semiconductor data processing, in particular to a method and device for processing wafer yield data. Background technique [0002] Chips are cut vertically and horizontally from the wafer. Depending on the size of the chip, hundreds, thousands or even tens of thousands of chips can be cut from a wafer. Only effective chips that can meet the design performance and function requirements can be delivered for use; effective The ratio of chips to the total number of chips on a wafer is called yield or yield. The higher the yield rate, the higher the commercial value of a wafer. If the yield rate is low, it means that the manufacturing process is not yet mature, and the product cannot enter mass production. The key to improving chip yield lies in the complete and effective monitoring and testing of the manufacturing process, combined with other data in the manufacturing process for accurate and rapi...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F3/0481G06F3/04847
CPCG06F3/0481G06F3/04847Y02P90/30
Inventor 杨文浩邵康鹏
Owner SEMITRONIX