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Chip detection system based on light field camera and two-dimensional camera and detection production line

A technology of light field camera and detection system, used in measurement devices, material analysis by optical means, instruments, etc.

Pending Publication Date: 2022-07-01
VOMMA (SHANGHAI) TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] However, when the existing technology is dealing with the detection of gold wires, it cannot analyze and obtain the defects of gold wires well.

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  • Chip detection system based on light field camera and two-dimensional camera and detection production line
  • Chip detection system based on light field camera and two-dimensional camera and detection production line
  • Chip detection system based on light field camera and two-dimensional camera and detection production line

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specific Embodiment

[0079] There are four specific embodiments attached to the present invention, the first two embodiments are embodiments of detecting gold wire defects by light field cameras, and the latter two embodiments are embodiments of detecting solder ball defects by two-dimensional cameras.

[0080] figure 2 a is the central view image under the light field camera, figure 2 b is the depth map, figure 2 c is a screenshot of the point cloud, figure 2 d is the three-dimensional curve graph of the gold wire in the marked area. From the three-dimensional curve graph, it can be judged that the defect type of the gold wire is a broken wire.

[0081] image 3 a is the central view image under the light field camera, image 3 b is the depth map, image 3 c is a screenshot of the point cloud, image 3 d is a three-dimensional curve graph of the gold wire in the marked area. From the three-dimensional graph, it can be determined that the defect type of the gold wire is broken.

[0082]...

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Abstract

The invention provides a chip detection system and a detection production line based on a light field camera and a two-dimensional camera, the two-dimensional camera is used for detecting a solder ball of a chip, and the light field camera is used for detecting a gold thread of the chip by adopting a gold thread detection method of the chip. According to the invention, the two-dimensional camera and the light field camera are combined, so that a sequential detection mode of solder balls and gold threads of the chip is realized, and an overall solution of chip detection is obtained. According to the invention, the two-dimensional camera is utilized to shoot the detected solder balls of the chip, and the light field camera is combined to shoot the detected gold threads of the chip, so that the defects such as wireless, line breakage, pin rising and line deviation can be overcome. The wire falling defect of the gold wire of the chip can be detected by analyzing the wire height.

Description

technical field [0001] The invention relates to the technical field of two-dimensional and three-dimensional photoelectric measurement of semiconductor chips, in particular to a chip detection system and a detection production line based on a light field camera and a two-dimensional camera. Background technique [0002] The current mainstream detection method of machine industrial vision still relies on 2D industrial cameras, that is, extracting the features of the measured object from the grayscale image and measuring in the X-Y plane. [0003] When encountering situations that require height measurement or Z-direction information, such as height measurement, depth measurement, thickness measurement, flatness measurement, volume measurement, and wear measurement, 2D industrial vision is often powerless. What's more, when the contrast of the grayscale image of the measured object is poor, and the characteristic value of the measured object cannot be accurately extracted, it ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/01G01N21/956
CPCG01N21/956G01N21/01G01N2021/0112
Inventor 李浩天徐雨哲
Owner VOMMA (SHANGHAI) TECH CO LTD