X-Y objective talbe

A stage and slider technology, applied in positioning devices, feeding devices, large fixed members, etc., can solve the problems of difficult to obtain high speed, increased weight, and difficult to obtain high speed at the same time, to achieve high moving flatness, High stopping accuracy and cost reduction effects
CN1534688AInactive Publication Date: 2004-10-06SUMITOMO HEAVY IND LTD
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
SUMITOMO HEAVY IND LTD
Publication Date
2004-10-06
Estimated Expiration
Not applicable · inactive patent

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Abstract

An x-y stage device is provided to obtain the high stop accuracy while reducing expensive components. Two guide rails(110,120) are fixed on a base(100). An Y slider(130) moves through the guide rails by combining with the guide rails. An X slider(140) is combined with the Y slider to move through the Y slider in perpendicularly. The Y slider is moved with separating from the surface of the base by supporting in the guide rails with rolling bearings. The X slider is moved by including the rolling bearing between the Y slider and moved with floating from the surface of the base by including plural static pressure bearings(141143). The stop accuracy is improved by a brake device(190).
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Description

technical field

[0001] The present invention relates to a stage device, and more particularly, to an X-Y stage device capable of moving a driven object such as a table in the X-axis direction and the Y-axis direction. Background technique

[0002] As an example of the X-Y stage device, the X-Y stage device proposed by the present inventors will be described. Such an X-Y stage device is disclosed in Patent Document 1.

[0003] 4 , the fixing part of the X-Y stage device is a base 20 whose upper surface is surface-finished as a guide surface, and guide rails 21 and 22 are fixedly arranged on the base 20 at predetermined intervals. In FIG. 4 , three directions of the X-axis, the Y-axis, and the Z-axis which are orthogonal to each other are shown. The guide rails 21 and 22 respectively have guide surfaces 21a and 22a extending in the Y-axis direction and facing each other. In the X-Y stage device, the movable parts that are linearly guided in the Y-axis direction along the gu...

Claims

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