X-Y objective talbe

Abstract

An x-y stage device is provided to obtain the high stop accuracy while reducing expensive components. Two guide rails(110,120) are fixed on a base(100). An Y slider(130) moves through the guide rails by combining with the guide rails. An X slider(140) is combined with the Y slider to move through the Y slider in perpendicularly. The Y slider is moved with separating from the surface of the base by supporting in the guide rails with rolling bearings. The X slider is moved by including the rolling bearing between the Y slider and moved with floating from the surface of the base by including plural static pressure bearings(141143). The stop accuracy is improved by a brake device(190).

Description

technical field [0001] The present invention relates to a stage device, and more particularly, to an X-Y stage device capable of moving a driven object such as a table in the X-axis direction and the Y-axis direction. Background technique [0002] As an example of the X-Y stage device, the X-Y stage device proposed by the present inventors will be described. Such an X-Y stage device is disclosed in Patent Document 1. [0003] 4 , the fixing part of the X-Y stage device is a base 20 whose upper surface is surface-finished as a guide surface, and guide rails 21 and 22 are fixedly arranged on the base 20 at predetermined intervals. In FIG. 4 , three directions of the X-axis, the Y-axis, and the Z-axis which are orthogonal to each other are shown. The guide rails 21 and 22 respectively have guide surfaces 21a and 22a extending in the Y-axis direction and facing each other. In the X-Y stage device, the movable parts that are linearly guided in the Y-axis direction along the gu...

AI Technical Summary

Problems solved by technology

[0012] Using a high-resolution linear scale, it is difficult to obtain high speed at the same time due to the limitation of its output signal frequency

In addition, with ball screws, it is difficult to achieve high speeds due to the constraints of dangerous speeds in the case of long strokes

[0013] On the other hand, in the case of not using a static pressure guided stacking stage, in order to obtain a high movement flatness of the workpiece table, it is necessary to improve the movement accuracy of the Y slider (lower axis) by machining, and in order not to It deforms with the movement of the X slider and requires high rigidity, so its weight inevitably increases

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