X-Y objective table

Abstract

The present invention proposes an X-Y axis stage device to reduce the expensive parts such as static-pressure bearing to the utmost, and to obtain high stopping precision. This device comprises: two guiding rails 110, 120 fixed on the base 100 and extended toward the direction of one axis; a Y-sliding member 130 combined to the guide rails to be extended along a direction right-angled to the uniaxial direction and traveling in the uniaxial direction along the guide rails; and an X-sliding member 140 combined to the Y-sliding member to allow traveling along a direction right-angled to the uniaxial direction along the Y-sliding member. The Y-sliding member is supported on two guiding rails through the rolling bearing 111, 121 and can move separately with the surface of the base. The X-sliding member is installed such that the rolling bearing is disposed between the Y-sliding members for moving, and it can possibly move in the state of floating above the base surface by plural static-pressured bearings 141~ 143 below and opposed to the base surface. Also, the stopping precision is increased by the brake mechanism 190.

Description

technical field [0001] The present invention relates to a stage device, in particular to an X-Y stage device capable of moving a driven object such as a worktable along the X-axis direction and the Y-axis direction. Background technique [0002] As an example of the X-Y stage device, the X-Y stage device proposed by the inventors of the present invention will be described. Such an X-Y stage device is disclosed in Patent Document 1. [0003] Referring to FIG. 4 , the fixed portion of the X-Y stage device is a base 20 whose upper surface is finished as a guide surface, and guide rails 21 and 22 fixedly arranged on the base 20 at predetermined intervals. In FIG. 4 , three directions of an X axis, a Y axis, and a Z axis which are perpendicular to each other are shown. The guide rails 21, 22 respectively have guide surfaces 21a, 22a extending in the Y-axis direction and facing each other. In the X-Y stage device, the movable part guided linearly in the Y-axis direction along t...

AI Technical Summary

Problems solved by technology

[0012] Using a high-resolution linear scale, it is difficult to obtain high speed at the same time due to the limitation of its output signal frequency

In addition, with ball screws, it is difficult to achieve high speeds due to the constraints of dangerous speeds in the case of long strokes

[0013] On the other hand, in the case of not using a static pressure guided stacking stage, in order to obtain a high movement flatness of the workpiece table, it is necessary to improve the movement accuracy of the Y slider (lower axis) by machining, and in order not to It deforms with the movement of the X slider and requires high rigidity, so its weight inevitably increases

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