Optical device for testing squint angle of faceplate

Abstract

The present invention relates to an optical detection equipment of oblique viewing angle of panel. It utilizes oblique viewing angle line scanning to detect a panel. Said equipment includes a frame, at least a pick-up device placed on said frame, a reflector placed on said frame and positioned under said pick-up device, and a panel carrier which is placed under said pick-up device and said reflector and is used for carrying panel to be tested. Said invented equipment can utilize the regulation of angle theta of included angle between said reflector surfeace and sight line of said pick-up device to make the oblique viewing angle of that the sight line of said pick-up device is reflected to the panel to be tested can be controlled, and said optical detection equipment can execute an oblique viewing angle line scanning process to detect the characteristics related to viewing angle or defect on said panel.

Description

technical field [0001] The present invention relates to a panel optical inspection (optical inspection) device, in particular to a tilted view optical inspection device that scans the panel with a tilted view angle and a line scanning method. technical background [0002] There are two types of general panel scanning detection methods: area scan and line scan. Among them, the method of using area scanning is to divide the whole panel into one area or multiple areas and scan, but scanning in this way has the following disadvantages: (1) the surface light source is difficult to be very uniform in a large area; (2) ) The flat field correction of surface light source inhomogeneity has a large amount of data, which makes it slower and more difficult to execute image digital signal processing (image DSP); (3) The algorithm for calculating image compensation is relatively Difficult to wait for shortcomings. [0003] On the other hand, line scan can improve the shortcomings of are...

AI Technical Summary

Problems solved by technology

Among them, the method of using area scanning is to divide the whole panel into one area or multiple areas and scan, but scanning in this way has the following disadvantages: (1) the surface light source is difficult to be very uniform in a large area; (2) ) The flat field correction of surface light source inhomogeneity has a large amount of data, which makes it slower and more difficult to execute image digital signal processing (image DSP); (3) The algorithm for calculating image compensation is relatively Difficult to wait for disadvantages

But on a flat panel display (Flat Panel Display, FPD), some display defects are related to the viewing angle (view angle), that is, the viewing angle between the imaging device 80 and the panel 90 to be tested is vertical in the known line scanning method , only performing x-axis scanning or y-axis scanning perpendicular to the viewing angle may not be able to detect some viewing angle-dependent features or defects

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