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Process for producing filmy optical waveguide

A technology of optical waveguide and optical waveguide parts, which is applied in the coupling of optical waveguide, optical waveguide light guide, light guide, etc., can solve the problem that the light incident end surface and the light exit end surface cannot have smoothness, and achieve the effect of efficient manufacturing

Inactive Publication Date: 2006-06-07
NITTO DENKO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, the light-incident end face and the light-exit end face obtained by this cutting method cannot have a sufficiently improved finish, although the productivity is improved.

Method used

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  • Process for producing filmy optical waveguide
  • Process for producing filmy optical waveguide
  • Process for producing filmy optical waveguide

Examples

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Comparison scheme
Effect test

example 1

[0047] Manufactured in the manner shown below as Figure 5 The thin film structure shown, then fabricates an optical waveguide in the manner shown below.

[0048] Fabrication of Thin Film Structures

[0049] A strip-shaped epoxy resin film (250 mm in width; 30 m in length; 30 μm in thickness; 1.55 in refractive index) was prepared for use as an under cladding layer. A core layer having a predetermined pattern (line width 50 μm; height 50 μm; refractive index 1.62) was formed from a photosensitive epoxy resin in a region where an optical waveguide was to be formed in the resin film. Next, a liquid epoxy resin was applied onto the core layer and then cured to form an upper cladding layer (thickness 30 μm; refractive index 1.55). In this way, a strip-shaped thin film structure (thickness 150 µm) having an optical waveguide formed therein was produced.

[0050] Optical waveguide formation

[0051] Subsequently, the individual optical waveguide members in the film structure...

example 2

[0057] Fabrication of Thin Film Structures

[0058] A strip-shaped fluorinated epoxy resin film (250 mm in width; 30 m in length; 20 μm in thickness; 1.51 in refractive index) was prepared for use as an under cladding layer. A region in the resin film where the optical waveguide is to be formed is formed of a photosensitive polyimide resin with a predetermined pattern of a core layer (line width 8 μm; height 8 μm; refractive index 1.54). Next, a polyamic acid solution (polyimide resin precursor solution) is applied to the core layer, and then imidized to form an upper cladding layer (thickness 20 μm; refractive index) made of polyimide resin. rate 1.51). In this way, a strip-shaped thin film structure (thickness 48 µm) having an optical waveguide formed therein was manufactured.

[0059] Optical waveguide formation

[0060] An optical waveguide was obtained in the same manner as in Example 1.

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Abstract

The present invention provides a method of making a thin film light guide using a thin film structure having one or more light guide elements formed therein, the method comprising: cutting each light guide element from the thin film structure, by This forms an optical waveguide having a light entrance end face and a light exit end face, wherein the cutting for producing the light entrance end face and the light emission end face is performed with a laser for producing cut faces other than the end face The cutting is done by punching with a die.

Description

technical field [0001] The present invention relates to a method of manufacturing a filmy optical waveguide widely used in optical communication, optical information processing and other general optical fields. Background technique [0002] Optical waveguides are incorporated in optical devices such as optical waveguide devices, optical integrated circuits, and optical wiring boards, and are widely used in optical communication, optical information processing, and other general optical fields. Examples of optical waveguides include thin-film optical waveguides having a three-layer structure including a lower cladding layer, a core layer having a predetermined pattern, and an upper cladding layer surrounding the core layer. [0003] Such an optical waveguide is generally obtained using a thin-film layer structure having an optical-waveguide part formed therein, and a diamond blade (rotary blade containing fine diamond particles dispersed therein) is used to extract the optica...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/25G02B6/10
CPCG02B6/1221G02B6/13G02B2006/1219G02B2006/12147G02B2006/1215
Inventor 宗和范清水裕介网野一郎望月周
Owner NITTO DENKO CORP
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