Pland display having umbrella-shaped grid array structure and its manufacturing technology

A flat-panel display and array structure technology, which is applied in image/graphic display tubes, cold cathode manufacturing, electrode system manufacturing, etc., can solve the problems of high control gate voltage and large gate current, and achieve increased display brightness and reduced damage. , the effect of improving the success rate of production

CN1794407AInactive Publication Date: 2006-06-28ZHONGYUAN ENGINEERING COLLEGE
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
Publication Date
2006-06-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

This invention relates to a panel display with an umbrella grating array structure and its process technology, in which, the display includes a sealed vacuum cavity composed of a cathode panel, an anode panel and surrounding glasses, a photoetched anode conduction layer and a fluorescence powder layer on the conduction layer, a wall supporting structure and getter elements, in which, an umbrella grating array structure is prepared on the cathode panel and the control to electronic emission of the cathode is strengthened on the basis of fine field emission property of the cathode to reduce the working voltage of the device and increase its emission efficiency.
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Description

technical field

[0001] The invention belongs to the fields of plane display technology, microelectronic science and technology, vacuum science and technology, and nano science and technology, and relates to the manufacture of flat panel field emission displays, in particular to flat panels for carbon nanotube cathodes. The content of device fabrication of field emission display, especially related to the fabrication process of field emission flat display device with umbrella grid array structure and carbon nanotube cathode. Background technique

[0002] Carbon nanotube is a coaxial tubular substance that can emit a large number of electrons under the action of an applied voltage. It has a small tip curvature radius, high aspect ratio, good field emission characteristics and excellent physical and chemical stability. Sex, is a very good cold cathode emission material, has attracted the attention of many researchers. The flat panel display using carbon nanotubes as the cathod...

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Embodiment Construction

[0033] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the present invention is not limited to these embodiments.

[0034] The present invention comprises a sealed vacuum chamber formed by a cathode panel 1, an anode panel 11 and surrounding glass enclosures 8; an anode conductive layer 12 photoetched on the anode panel 11 and a phosphor layer prepared on the anode conductive layer 12 14 . The support wall structure 9 and the accessory element 10 of the getter are fabricated on the cathode panel 1 with an umbrella-shaped grid array structure.

[0035] The umbrella gate structure includes a cathode panel 1, a gate conductive layer 2 arranged on the cathode panel 1, and a doped polysilicon layer 3 arranged on the gate conductive layer 2, wherein the shape of the doped polysilicon layer 3 is An umbrella structure, the insulating isolation layer 4 after etching covers all the doped polysilicon layer 3, the in...