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Pressure impression die comprising cycloolefin copolymer

A cyclic olefin copolymer, a technique for stamping, applied in the process of processing and utilizing such a polymer stamp, a two-step process for making and using such a polymer stamp, the field of polymer stamping of the stamping process, It can solve the problems of non-reusability, difficult template demoulding, and reducing the fidelity of copies.

Active Publication Date: 2011-11-09
OBDUCAT AB SE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Rigid stamp or substrate materials are often used, which will cause air impurities between the stamp and the plastic layer when the stamp is pressed against the substrate, also reducing the fidelity of the reproduction
Moreover, particulate impurities between the stamp and the plastic layer can cause significant damage to the stamp or substrate during the imprinting process, especially when neither the stamp nor the substrate are composed of flexible materials
Physical damage to the stamp or the substrate or both can also occur when the rigid stamp is released from the rigid substrate, making it difficult to release the substrate and templates including patterns with high aspect ratios after the imprint process
Impressions once damaged are usually not reusable

Method used

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  • Pressure impression die comprising cycloolefin copolymer
  • Pressure impression die comprising cycloolefin copolymer
  • Pressure impression die comprising cycloolefin copolymer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0120] A nickel template with a line pattern of 80 nm line width and 90 nm height on the surface was imprinted into Zeonor ZF14 at 150° C. and 50 bar for 3 minutes. The Ni surface is pretreated with a fluorinated SAM anti-stick layer to obtain a low surface tension below 20mN / m, preferably below 18mN / m. The Zeonor foil is mechanically removed from the stencil surface without damaging either the pattern of the stencil or the replica. Zeonor foil was used as a new template, which was imprinted into a 100 nm thick SU8 film. The SU8 film was spin-coated onto a 20nm LOR film previously spin-coated onto a silicon substrate, and to improve the anti-sticking properties between the SU8 film and the Zeonor foil, none of the surfaces were treated with an additional coating. Imprinting was performed at 70° C. and 50 bar for 3 minutes. The SU8 film was exposed to UV light for 4 seconds through an optically clear Zeonor foil and baked for 2 more minutes. Throughout the imprinting process...

Embodiment 2

[0122] Using the same method and the same parameters as already described in Example 1, a nickel template (developed by AFM) with a BluRay pattern on the surface with a structure height of 100 nm and a width of 150 nm was imprinted into Zeonor ZF14. Zeonor foil was used as a new template, which was imprinted into a 100 nm thick SU8 film. Again, the same method and the same parameters as already described in Example 1 were used here. AFM images of imprints obtained in SU8 thin films deposited on silicon wafers in image 3 shown in .

Embodiment 3

[0124] A nickel template with a surface comprising a micron pattern of high aspect ratio in the range of 1-28 was used. Feature sizes range from 600nm-12μm with a height of 17μm. Prior to embossing, the surface is covered with a phosphate-based anti-adhesive film. The nickel template was imprinted into polycarbonate foil at 190°C and 50 bar for 3 minutes. To improve the anti-sticking properties between the Ni template and the polycarbonate film, the surface of the polycarbonate foil was treated with an additional coating. The release temperature is 130°C at which the polycarbonate foil can be mechanically removed from the nickel surface without damaging either the pattern of the template or the replica. A polycarbonate foil was used as a new template to emboss the Topes foil. Imprinting was carried out at a temperature of 120° C. and a pressure of 50 bar for 3 minutes. None of the surfaces were treated with an additional coating in order to improve the anti-stick propertie...

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Abstract

A method is provided for transferring a pattern from a template (1) to an object (12) in an imprint process, using a two-step process. The first step includes contacting a pattern of the template surface with a polymer material comprising one or more Cyclic Olefin Copolymers (COCs), to produce a flexible polymer replica having a structured surface with an inverse of the pattern of the template surface. In a second step, after releasing the flexible polymer replica from the template, the inverse pattern of the flexible polymer replica is pressed into a resist layer on a substrate, to imprint areplica of the pattern of the template surface in therein.

Description

technical field [0001] The present invention relates to the field of imprint lithography, which includes the process of transferring a pattern from a template or stamp to a substrate by bringing the structured surface of the template or stamp into contact with a plastic layer on a target surface of the substrate. More specifically, the present invention relates to polymeric stamps for imprinting processes having material properties that make said polymeric stamps suitable for such processes. The invention also relates to a two-step process for making and using such polymer stamps. In this two-step process, a replica of the template pattern is formed on a flexible polymer foil by embossing or injection molding to obtain an intermediate polymer stamp, which is then used in a second step to The pattern is imprinted on the plastic layer applied to the target surface of the substrate. In particular, the present invention relates to polymeric stamps made from materials comprising ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/00
CPCB82Y40/00G03F7/0002B82Y10/00
Inventor 巴贝克·海达里马克·贝克马赛厄斯·基尔
Owner OBDUCAT AB SE
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