Pattern replication with intermediate stamp

A cyclic olefin copolymer, copolymer technology, applied in the process of processing and utilizing such a polymer stamp, a two-step process of making and using such a polymer stamp, the field of polymer stamps for imprinting processes, It can solve the problems of non-reusable, reducing the fidelity of replicas, difficult template release, etc.
CN1916759AActive Publication Date: 2007-02-21OBDUCAT AB SE
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
OBDUCAT AB SE
Publication Date
2007-02-21

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Abstract

The invention relates to a process method for reproducing a pattern from a template (1) in order to manufacture replicas (5,9) from the template into different materials in a suitable process, whereas in a first step replicas of a template having a patterned surface are formed into flexible polymer foils. In a second step the so-produced replicas can be used as flexible polymer templates to reproduce the pattern into an object surface.
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Description

technical field

[0001] The present invention relates to the field of imprint lithography, which includes the process of transferring a pattern from a template or stamp to a substrate by contacting the structured surface of the template or stamp with a plastic layer on a target surface of the substrate. More specifically, the present invention relates to polymeric stamps for imprinting processes having material properties that make the polymeric stamps suitable for such processes. The present invention also relates to a two-step process for making and using such polymeric stamps. In this two-step process, a replica of the template pattern is formed on a flexible polymer foil by embossing or injection molding to obtain an intermediate polymer stamp, which is then used in the second step to A pattern is imprinted on the plastic layer applied to the target surface of the substrate. In particular, the present invention relates to polymeric stamps made from materials comprising on...

Claims

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