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Grinding method for superhard silicon carbide ceramic nano mirror

A super-hard silicon carbide and nano-mirror technology, which is applied to optical surface grinders, grinding machine parts, grinding/polishing equipment, etc. De-fine and fine-grinding process, simple effect of the device

Inactive Publication Date: 2007-06-27
SOUTH CHINA UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the processing technology of such a fine-grained diamond grinding wheel is very difficult, so the processing cost is also very high

Method used

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  • Grinding method for superhard silicon carbide ceramic nano mirror
  • Grinding method for superhard silicon carbide ceramic nano mirror

Examples

Experimental program
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Effect test

Embodiment

[0037] A #180 rough diamond grinding wheel with a diameter of 180 mm is used on a CNC precision grinding machine (SMRART B818), and the CNC system is used to drive the grinding wheel to travel along the axis of the grinding wheel to perform nano-mirror grinding on reaction sintered silicon carbide ceramics (RB-SiC). Use #180GC grinding stone to sharpen #180 diamond grinding wheel, so that the diamond abrasive grains on the working surface of the grinding wheel can fully emerge and maintain a certain edge height. The sharpening condition is: N=1500r / min, V f =600mm / min, f x =5mm, a=0.3mm, Σa=4mm, BM2 grinding fluid. After sharpening, use cast iron to trim the working surface of the diamond grinding wheel that has been edged to increase the number of effective abrasive grains n g , to increase the average edge angle θ of abrasive grains. Cast iron dressing conditions are: N=3000r / min, V f =1500mm / min, f x =0.1mm, a=5μm, Σa=0.1mm, BM2 grinding fluid.

[0038] During the gri...

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Abstract

The superhard silicon carbide ceramic nanometer mirror grinding process includes grinding the workpiece with dressed and shaped coarse diamond wheel in Z direction for plastic domain grinding with the cutting depth controlled within 100 nm; shifting the coarse diamond wheel in X direction for the distance fx and performing the next grinding so as to form envelope trace of height he on the surface of the workpiece and form flat smooth nanometer mirror. In the conditions of proper grinding wheel diameter Dish washer, fx smaller than 100 microns, the envelope trace height he will smaller than 15 nm. The present invention makes it possible to realize super precision surface machining in the machine tool of only micron level or submicron level precision. The present invention has low cost, great grinding ratio and high machining efficiency.

Description

technical field [0001] The invention relates to the technical field of superhard material surface processing, in particular to a grinding method for a superhard silicon carbide ceramic nano-mirror surface. Background technique [0002] The nano-mirror feature of the machined surface is represented by the surface roughness R a It is less than 20 nanometers and has no brittle damage on the micro-processed surface. It is an important index to meet the mechanical performance requirements of precision parts and precision molds. [0003] Usually, superhard materials such as superhard silicon carbide ceramics and hard steel are processed into mirror surfaces by polishing agent polishing method. However, the polishing agent polishing method has very low efficiency, high cost and serious pollution. Therefore, ultra-fine diamond grinding wheels are used to realize mirror grinding of superhard material parts. However, it is very difficult to sharpen ultrafine diamond grinding wheel...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B7/22B24B13/00B24B19/22B24B53/04
Inventor 谢晋
Owner SOUTH CHINA UNIV OF TECH
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