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Aberration corrector and charged particle beam device

Active Publication Date: 2020-08-25
JEOL LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, even if the six-fold astigmatism is corrected, a sixth-order three-lobe aberration that is a sixth-order aberration in terms of geometrical aberration (a seventh-order aberration in terms of wave aberration) cannot be corrected and remains as an aberration that restricts an aberration-corrected range.

Method used

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  • Aberration corrector and charged particle beam device
  • Aberration corrector and charged particle beam device
  • Aberration corrector and charged particle beam device

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first embodiment

1. First Embodiment

[0035]First, an electron microscope according to a first embodiment will be described with reference to the drawings. FIG. 1 is a diagram illustrating a configuration of an electron microscope 1 according to the first embodiment.

[0036]The electron microscope 1 includes an aberration corrector according to an embodiment of the invention. A case where an aberration corrector 100 is included as the aberration corrector according to an embodiment of the invention will now be described.

[0037]As illustrated in FIG. 1, the electron microscope 1 is configured so as to include an electron gun 10, a condenser lens 20, an objective lens 30, a specimen stage 40, the aberration corrector 100, an intermediate projector lens 50, and a detector 60. In the electron microscope 1, the aberration corrector 100 is used in order to correct an aberration of an imaging system.

[0038]The electron gun 10 generates an electron beam. The condenser lens 20 focuses the electron beam emitted fro...

second embodiment

2. Second Embodiment

[0078]Next, an electron microscope according to a second embodiment will be described with reference to the drawings. FIG. 5 is a diagram illustrating a configuration of an electron microscope 2 according to the second embodiment. Hereinafter, in the electron microscope 2 according to the second embodiment, members having similar functions to the components of the electron microscope 1 according to the first embodiment will be denoted by same reference characters and a detailed description thereof will be omitted.

[0079]The electron microscope 2 includes an aberration corrector according to an embodiment of the invention. A case where an aberration corrector 200 is included as the aberration corrector according to an embodiment of the invention will now be described.

[0080]In the electron microscope 1 described above, the aberration corrector 100 is built into the imaging system as illustrated in FIG. 1.

[0081]In contrast, in the electron microscope 2, the aberratio...

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Abstract

An aberration corrector includes: a first multipole, a second multipole, a third multipole, and a fourth multipole arranged along an optical axis A; a first transfer lens system arranged between the first multipole and the second multipole; a second transfer lens system arranged between the second multipole and the third multipole; and a third transfer lens system arranged between the third multipole and the fourth multipole, wherein each of the first multipole, the second multipole, the third multipole, and the fourth multipole generates a three-fold symmetric field.

Description

CROSS-REFERENCE TO RELATED APPLICATION[0001]This application claims priority to Japanese Patent Application No. 2018-067698 filed Mar. 30, 2018, the disclosure of which is hereby incorporated by reference in its entirety.BACKGROUND OF THE INVENTIONField of the Invention[0002]The present invention relates to an aberration corrector and a charged particle beam device.Description of Related Art[0003]In electron microscopes such as a transmission electron microscope (TEM) and a scanning electron microscope (SEM), aberration correction is an important technique in terms of acquiring a high resolution image.[0004]For example, a two-stage three-fold-field type Cs corrector in which hexapoles are arranged in two stages is disclosed in: H. Rose (Optik, vol. 85, (1990) pp. 19-24); H. Haider et al. (Nature, vol. 392 (1998) pp. 768-769); H. Muller, et al. (Microsc. Microanal. 12, (2006) 442-455). In the Cs corrector disclosed in: H. Rose (Optik, vol. 85, (1990) pp. 19-24); H. Haider et al. (Nat...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): H01J37/10H01J37/153H01J37/28
CPCH01J37/10H01J37/28H01J37/153H01J2237/1534H01J2237/2802H01J2237/1516H01J2237/103H01J2237/1532
Inventor MORISHITA, SHIGEYUKI
Owner JEOL LTD