Magnetic seal for wafer containers

a magnetic seal and container technology, applied in the field of enclosures, can solve the problems of generating or exposing the wafers to potential wafer ruining contaminants, containers are subject to very demanding structural requirements and performance requirements, and contaminants in the form of particulates are becoming more problemati

Inactive Publication Date: 2007-08-02
ENTEGRIS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0007] The substrate container of the present invention provides a magnetic seal or gasket between a door and an enclosure portion. The magnetic seal is formed around the periphery of a door and a door frame by utilization of a magnetic field between the door and the enclosure. The magnetic field is created by a magnet as part of at least of two opposing sealing parts. The door comprises one sealing part on the periphery of the door and the other cooperating part is on the door frame portion of the enclosure. In preferred embodiments, one part comprises a flexible or elastomeric gasket with a magnet or magnetic material therein. The second part has an opposing surface preferably with either a metallic strip or another magnet

Problems solved by technology

Such intra and extra movements may generate or expose the wafers to potential wafer ruining contaminants.
As semiconductor integrated circuits have become smaller in scale, that is, as the number of circuits per unit area has increased, contaminants in the form of particulates have become more problematic.
These containers are subjected to very demanding structural requirements and performance requirements.
Such sealing, particularly where polycarbonate is the contacted by the elastomeric seal, tend to stick excessively and provide inconsistent opening, reduced life expectancy of the seal and inadequate sealing.

Method used

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  • Magnetic seal for wafer containers
  • Magnetic seal for wafer containers
  • Magnetic seal for wafer containers

Examples

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Embodiment Construction

[0019] Prior art FIGS. 1 and 2 show a bottom-opening SMIF pod 20 and a front-opening transport module or FOUP 30 respectively for which the invention is highly suitable. Each sealable enclosure has a enclosure portion 34 and a cooperating door 36. The SMIF pod 20 also has a separate wafer carrier 38 which is a H-bar carrier, well known in the art, which seats on the top surface 40 of the door 36. A plurality of wafer supports 39 are present in each of both substrate containers.

[0020] Each enclosure portion 34 and each enclosure has a top side 46, a front side 48, and a bottom side 50. In the SMIF pod the bottom side 50 is open for receiving the wafer carrier 38 and the door 36. In the transport module 30 the front side 48 is open and is closed by the door 36. A recessed lip 51 is located at the periphery of enclosure portion 34.

[0021] The doors have an inwardly facing side 52, an outwardly facing side 53, and a periphery 54 including four sidewalls 55. Each of the doors 36 compris...

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PUM

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Abstract

A wafer container with the door frame has a magnetic seal that encircles the periphery of the door and has a flexible portion extending laterally outwardly to engage a corresponding magnetic seal around the periphery of the door. Thus the door and container can be provided with a seal that is strong enough to exclude contaminants and also allows easy removal of the door either manually or by a robotic arm.

Description

BACKGROUND OF THE INVENTION [0001] This invention relates to enclosures. More particularly, it relates to sealable enclosure for holding wafers to be manufactured into semiconductors. [0002] Semiconductor wafers are subjected to numerous steps during processing. This usually entails transporting a plurality of wafers from one workstation to another for processing by specialized equipment. As part of the processing procedure, wafers may be temporarily stored or shipped in containers to other plants or to end users. Such intra and extra movements may generate or expose the wafers to potential wafer ruining contaminants. In order to reduce the deleterious effect of contaminants on wafers, specialized containers have been developed to minimize the generation of contaminants and to isolate wafers from contaminants exterior to the containers. A principal feature common to these devices is that they are provided with removable doors or closures which seal or are sealed by tape or externall...

Claims

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Application Information

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IPC IPC(8): B65D85/00
CPCH01L21/67376H01L21/67126
InventorGREGERSON, BARRY
OwnerENTEGRIS INC