Fingerprint sensors with ESD protection
a fingerprint sensor and protection technology, applied in the field of fingerprint sensors, can solve the problems of esd protection options often running into a fundamental limitation, fingerprint sensors are prone to various levels of esd voltage, and image quality may be deteriorated
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[0064]As described below, fingerprint sensors were fabricated with disclosed ESD protection approaches. ESD performance, scratch resistance, and reliability were tested.
1st Production Example
[0065]The first production example of the fingerprint sensor was implemented with the structure described in connection with FIG. 9, where an ESD protection layer 80 is disposed over the entire second insulating layer 66 like a blanket, followed by application of the hard coat layer 68. The ESD protection layer 80 was disposed onto a contact pad connected to external ground. The second insulating layer 66 was a 5000 Å-thick silicon nitride layer deposited though plasma-enhanced chemical vapor deposition (PECVD). The ESD protection layer 80 was a 2000 Å thick Molybdenum (Mo) layer, with a sheet resistance of approximately 0.6 ohm / sq. The hard coat layer was a 1900 Å-thick silicon nitride layer followed by a PECVD deposited 1.2 μm-thick Diamond-Like-Carbon (DLC) layer.
[0066]ESD performance was tes...
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