The present invention relates to an alkaline composition for cleaning a substrate comprising a structure of
copper or a
copper alloy and a structure comprising
cobalt or a
cobalt alloy, the composition comprising: (a) 0.0001% to 0.2% by weight of a
cobalt corrosion inhibitor selected from the group consisting of surfactants selected from the group consisting of (i) C10 to C20
alkyl sulfonic acids or C12 to C24
alkyl benzenesulfonic acids, and (ii) 0.01% to 0.2% by weight of a cobalt
corrosion inhibitor selected from the group consisting of cobalt or cobalt; (ii) a C8 to C17
alkyl phosphonic acid or an aminophosphonic acid (I1) of formula I1 wherein RI1 is a C8 to C20 alkyl group, RI2 is selected from H, C1 to C6 alkyl groups and-XI1-P (O) (OH) 2, and XI1 is selected from C1 to C6 alkanediyl groups, (iii) a C12 to C18 alkyl
carboxylic acid or
sarcosine or cocoyl
sarcosine (I2) of formula I2 wherein RI1 is a C12 to C20 alkyl group, RI3 is selected from H, C1 to C6 alkyl groups and-XI1-C (O)-OH, and XI1 is selected from C1 to C6 alkanediyl groups, (iv) C10 to C20 mono or dialkyl esters of phosphoric acids, (v) (v) C10 to C20 mono or dialkyl esters of phosphoric the alkyl groups of (i) to (iv) may be interrupted by one or more O or may comprise one or more double bonds, (v) salts of (i) to (iv); (b) from 0.0001% to 0.5% by weight of a
copper corrosion inhibitor selected from the group consisting of
benzotriazole, 5-chlorobenzotriazole, 4-methylbenzotriazole; the catalyst is 2, 5-methyl
benzotriazole; the catalyst is tetrahydrobenzotriazole; and a methyl-
benzotriazole-1-yl)-methyl-imino-diethanol, and a mixture thereof; (c) from 0.05% to 1% by weight of a C2 to C7 monoaminoalkanol; and (d) a
solvent; wherein the
solvent consists essentially of water. # imgabs0 #