A groove linked to the through-silicon via enables ALD or CVD superconducting film deposition without etching damage, improving stacked-chip connections.
Stress relief units and lever structures let a MEMS mirror reach wide scan angles at low voltage while improving breakage tolerance.
Compact molded packages are pretested in parallel, then fused to separate connectors to keep socket access while increasing panel density.
A stator pad and via route sensor connections vertically, cutting long wire bonds, board area, and shorting risk in moving MEMS packages.
Rotating L-shaped stoppers clamp a MEMS movable mass transversely to balance stop forces, limit damage, and guide rebound direction.
An elastomer-isolated, hermetically sealed MEMS package uses flexible interconnects to limit temperature, shock, and vibration errors.
Side-located vents and lid channels keep ambient airflow to the sensor cavity while reducing contaminant entry that can impair pressure accuracy.
Vertical stacked MEMS packaging uses vias and short interconnects to let the sensor rotor move freely while reducing wire-bond shorting risk.
An 8T SRAM cell boosts read and write performance by adding transistors and sharing source regions to avoid increasing memory cell area.
Reinforcement vias tie the cap ring to ground contacts, relieving thermal-cycling stress and reducing package delamination.