Compositely packaged foil type manganin superhigh pressure sensor

A technology of ultra-high pressure and sensors, which is applied to the measurement of the properties and forces of piezoelectric resistance materials, etc., can solve the problems that embedded measurement cannot be used, the thickness of the sensor is thick, and the application range is limited, and it can achieve easy calibration and thickness Thinning, easy-to-use effect
CN100346143CInactive Publication Date: 2007-10-31UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
UNIV OF ELECTRONICS SCI & TECH OF CHINA
Publication Date
2007-10-31
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a composite packing foil-type manganin super-pressure sensor, which comprises the following parts: manganin voltage-sensitive element (2), organic insulating film (3), adhesive (4) and inorganic insulating film (6), wherein the inorganic insulating film (6) is composed of aluminum oxide and magnesium oxide, whose thickness is 1-30 mu m; the inorganic insulating film (6) is set on front-to-back face of manganin voltage-sensitive element (2), which makes the organic insulating film (3) on two faces of the inorganic insulating film (6) through adhesive (4). The invention realizes the organic-to-inorganic composite pack, which can measure the pressure more than 50 GPa with simple structure and high precision.
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Description

technical field

[0001] The invention belongs to the technical field of electronic materials and devices, and in particular relates to manganin pressure sensor technology.

[0002] Related to manganin pressure sensors, especially ultra-high pressure sensors. Background technique

[0003] As we all know, manganese copper is a ternary alloy whose main components are copper (84-87%), manganese (11-13%) and nickel (2-3%), and has piezoresistive effect. The alloy does not undergo phase transformation under high pressure, and in principle, the pressure above 100GPa can be tested. However, the insulation performance of the packaging material of the sensor drops sharply under high voltage, forming a high-voltage bypass effect, which seriously attenuates the output signal of the sensor, and limits the increase of the upper limit of the manganin sensor's range. Therefore, the upper limit of the range of the manganin sensor is determined by the high-voltage insulation performance of t...

Claims

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