Compositely packaged foil type manganin superhigh pressure sensor
An ultra-high pressure, sensor technology, applied in the measurement of the property force of piezoresistive materials, etc., can solve the problems of inability to use embedded measurement, limited application range, thick sensor thickness, etc., to achieve easy calibration and use. Convenience and thickness reduction effect
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[0031] Manganese copper foil 8 with a thickness of 28 μm is selected, and it is firstly etched into an H-shaped pattern by photolithography. Then use the magnetron sputtering method on the lead position of the manganese copper foil ( Figure 4 Copper film 9 is deposited on the front and back sides of the shaded part in ), with a film thickness of 2-5 μm. The manganese-copper foil and the lead constitute the pressure sensitive element 2 . Next, an aluminum oxide thin film 6 is deposited on the front and back sides of the pressure sensitive element 2 by electron beam evaporation, with a film thickness of 2-8 μm. Finally, sandwich the pressure-sensitive element coated with aluminum oxide film between two polytetrafluoroethylene films 3 and bond them together with a thin adhesive 4. The thickness of the polytetrafluoroethylene film is 250 μm.
[0032] The transient waveform diagram of the complete shock wave pressure recorded by the sensor in this specific embodiment is as follo...
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