Method and apparatus for analyzing manufacturing data
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A data and database technology, applied in the field of analyzing manufacturing data and devices, can solve problems such as difficulties in relational databases
Inactive Publication Date: 2008-02-20
APPLIED MATERIALS INC
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In this regard, there are two inherent problems with prior art relational databases that cause difficulties when such relational databases are used in a fab
The first problem is that a user (such as a programmer) must have an essential understanding of the data before creating the concrete schema (ie, relationships and database tables) for the data to be modeled
The second problem is that although relational databases have good TPS rates (i.e., transaction processing specifications) for retrieving small data transactions (such as, for example, savings, airline ticket sales, etc.), they do not perform properly and produce large Large data sets to support decision support systems such as data inventory and data mining needed (among other requirements) to improve yield in the fab
Also, rule induction or decision tree analysis on these large-scale datasets can still take hours before the analysis is complete, although not necessarily breaking the RAM limitations of a single Windows process
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[0049] One or more embodiments of the present invention enable improved yields, inter alia, by providing one or more of: (a) data from integrated circuit ("IC") manufacturing plants (i.e., "semiconductor fabs" or "fabs") feed, i.e. by means of streams of multi-format data files; (b) indexing databases of tens of thousands of measurements, such as, but not limited to, indexing in databases such as, but not limited to, an Oracle Hybrid database of tens of thousands of measurements in the file system; (c) decision analysis data feed with fast export of multiple data sets for analysis; (d) independent question answering using "data value system" (e) various data mining techniques such as, but not limited to, neural networks, rule induction, and multi-variant statistics; (f) visualization tools ( visualizationtool), which is adapted to perform lookups by means of various improved statistics; and (g) an application service provider ("ASP") that provides rapid deployment to an end-to...
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Abstract
A method for data mining information obtained in an integrated circuit fabrication factory ("fab") that includes steps of: (a) gathering data from the fab from one or more of systems, tools, and databases that produce data in the fab or collect data from the fab; (b) formatting the data and storing the formatted data in a source database; (c) extracting portions of the data for use in data mining in accordance with a user specified configuration file; (d) data mining the extracted portions of data in response to a user specified analysis configuration file; (e) storing results of data mining in a results database; and (f) providing access to the results.
Description
[0001] This application claims the benefit of the following patent applications: (1) U.S. Provisional Application No. 60 / 305,256, filed July 16, 2001; (2) U.S. Provisional Application No. 60 / 308,125, filed July 30, 2001;( 3) U.S. Provisional Application No. 60 / 308,121 filed on July 30, 2001; (4) U.S. Provisional Application No. 60 / 308,124 filed on July 30, 2001; (5) U.S. Provisional Application No. 60 / 308,124 filed on July 30, 2001; U.S. Provisional Application No. 60 / 308,123; (6) U.S. Provisional Application No. 60 / 308,122, filed July 30, 2001; (7) U.S. Provisional Application No. 60 / 309,787, filed August 6, 2001; and (8) US Provisional Application No. 60 / 310,632, filed August 3, 2001, all references herein are incorporated. field of invention [0002] One or more embodiments of the invention relate to methods and apparatus for analyzing information generated in a factory, such as, but not limited to, an integrated circuit ("IC") manufacturing or assembly facility (ie, a "sem...
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