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Probe structure of preventing noise interference for semiconductor test board

A technology of noise interference and test board, which is applied in the direction of single semiconductor device test, semiconductor/solid state device test/measurement, components of electrical measuring instruments, etc., and can solve problems such as inconvenience, noise interference, and impact on wafer test quality

Inactive Publication Date: 2008-09-10
陈文祺
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The known relationship between the probes 30a that are too close to each other and the digital / analog signals mixed with each other causes the probes 30a to generate mutual noise interference, which in turn affects the quality of wafer testing
[0007] It can be seen from the above that the above-mentioned probes for semiconductor test boards obviously have inconvenience and shortcomings in actual use, and can be improved.

Method used

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  • Probe structure of preventing noise interference for semiconductor test board
  • Probe structure of preventing noise interference for semiconductor test board
  • Probe structure of preventing noise interference for semiconductor test board

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Embodiment Construction

[0049] see image 3 As shown, it is a schematic cross-sectional view of the first embodiment of the probe structure for preventing noise interference of the semiconductor test board according to the present invention. It can be seen from the figure that the present invention provides a probe structure for preventing noise interference for a semiconductor test board, which includes: a plurality of probe layers 1 and a plurality of spacers 2 .

[0050]Wherein, the semiconductor test board can be a probe card. Each probe layer 1 has a plurality of probes 10 electrically connected to the circuit board (not shown) of the semiconductor test board, and the probes 10 are spaced apart from each other by a predetermined distance and arranged in a matrix . In addition, a portion of the above-mentioned probe 10 has a needle diameter D larger than the normal needle diameter d, which is used to reduce the resistance value of this part of the probe and increase the working efficiency of th...

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Abstract

A probe structure used for avoiding noise interference of semiconductor testing board is prepared as setting multiple probes on each probe layer, setting isolation plates separately between each two probe layers for avoiding noise between probe layers, setting isolation needles to be earthed and connecting them separately to parts of said probes in electric way for isolating noise from the other probes, setting blank spaces between partial probes for increasing space between probes and for isolating noise between partial probes.

Description

technical field [0001] The present invention relates to a kind of probe structure that is used for semiconductor test board to prevent noise (noise) interference, particularly relates to a kind of by means of spacer, grounding (grounding) isolating pin and / or space (space), to increase probe The probe needle's anti-noise ability prevents the probe structure from noise interference. Background technique [0002] After the wafer (wafer) is manufactured, it needs to enter the wafer testing stage to ensure whether its function meets the standard. Generally, wafer testing is to use a test machine and a probe card to test each die on the wafer, so as to ensure whether the electrical characteristics and performance of the die are in accordance with the original design specifications. As the functions of the chip become stronger and more complex, the demand for high-speed and accurate testing becomes more important. [0003] Furthermore, the probe card is used for functional testi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R1/073G01R31/26H01L21/66
Inventor 陈文祺
Owner 陈文祺