Linking base plate rotating method
A substrate and linkage technology, applied in the field of linkage substrate rotation, can solve problems such as substrate rotation error and product qualification rate drop, and achieve the effect of improving the substrate rotation direction error
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[0032] Please refer to figure 2 , figure 2 It is a schematic diagram of the conveyor belt used to transport the substrate in the interlocking substrate rotation method of the present invention. like figure 2 As shown, a plurality of substrates 40 are carried on the conveyor belt 32 . Wherein, each substrate 40 may be a glass substrate, and each substrate 40 includes a substrate identification code (glass identification). A plurality of rotating stations 34 , 36 , 38 are also arranged on the conveyor belt 32 , and each of the rotating stations 34 , 36 , 38 is provided with a machine for performing photoresist coating or exposing and developing processes on the substrate 40 . For example, a photoresist coating machine can be installed next to the rotary station 34 , an alignment machine can be installed next to the rotary station 36 , and a developing machine can be installed next to the rotary station 38 . In addition, multiple pairs of sensors (sensors) 42 are disposed ...
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