Measuring device provided with a probe-tip

Abstract

The inventive measuring device (1) is used for measuring the shape, outline and / or roughness of a part and comprises a contact-less optical probe having a large numerical aperture provided with at least two different focal points associated with at least two optical receptors. Said optical receptors produce a differential signal for controlling a positioning device (13) for tracking said optical probe in such a way that the part surface is maintained inside the measuring area thereof. Said differential signal makes it possible to rapidly and accurately tracking the position of a sensor arrangement (3).

Description

technical field The invention relates to measuring devices, in particular devices for measuring roughness, contour or shape. Background technique For measuring roughness, shape or profile, optical or tactile measurement methods have been used so far, each with typical limitations. The principle of tactile measurement is essentially based on contacting the workpiece surface with a stylus body. This can cause deformation of the surface, soiling or even damage. The optical measuring principle has other limitations which can occasionally similarly lead to difficulties. For example, problems may be encountered during the optical measurement of inclined surfaces, and further, limitations in measurement speed and measurement errors may arise due to edge deviations. GB 2144537 A discloses an optical profile measurement device based on confocal microscope method. This measuring device has a point-shaped white light source and an objective lens that focuses the light that was pre...

AI Technical Summary

Problems solved by technology

Measuring range limited to a few nanometers