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Calibration method and apparatus for silicon piezoresistive transducer in-circuit programmable automatic temperature compensation

A temperature compensation and sensor technology, which is used in the measurement of fluid pressure using piezoelectric devices, the measurement and instrumentation of the property force of piezoelectric resistance materials, etc., can solve the problems of low automation level, etc. difficult effect

Inactive Publication Date: 2009-04-29
JIANGHAN UNIVERSITY
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Problems solved by technology

At present, the production of sensitive components of silicon pressure sensors in my country has passed the customs and can be supplied in large quantities, but the design of signal conditioning circuits for automotive-grade pressure sensors, the compensation method of temperature characteristics, and the automation level of the production process are all very low. , so this huge product market with an annual output value of one billion is all monopolized by foreign products

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  • Calibration method and apparatus for silicon piezoresistive transducer in-circuit programmable automatic temperature compensation
  • Calibration method and apparatus for silicon piezoresistive transducer in-circuit programmable automatic temperature compensation
  • Calibration method and apparatus for silicon piezoresistive transducer in-circuit programmable automatic temperature compensation

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Embodiment Construction

[0027] 1. Calculation principle: The temperature compensation and pressure output correction equation of the silicon piezoresistive sensor obtained through in-depth research can be digitally calculated: if you want to use a computer to process the data of the sensor temperature compensation, the most critical problem is to find a one that can Completely express the comprehensive output equation of the sensor under the influence of its relevant factors, through more than 3 years of application development and research on piezoresistive sensors, and consult a large number of literature, the output of the piezoresistive sensor is a function of the pressure and temperature it bears, i.e. V O =f(P,T). Its output equation can be expressed as: V O =V OS +△T·αV OS +P(S+△T·αS) (According to the actual situation that the accuracy requirements of automotive-grade sensors are not too high, this equation omits some quadratic items that affect the output of the sensor in order to perform...

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Abstract

The invention provides a silicon piezoresistive transducer's auditing method and apparatus for circuit programming auto temperature compensation, which comprises the following steps: (1) storing the calculator program of the equation: VO=VOS+delta T.alpha VOS+P(S+delta T.alpha S) including the program of silicon piezoresistive transducer unit and flush type control circuit silicon piezoresistive transducer into ROM as compensating parameter register; (2) inputting VOS, alpha VOS, S, alpha S as temperature compensating parameter of the three different temperatures into flush type control circuit E2PROM to form compensating parameter register. Correcting device includes computer programmable pressure signal source and incubator, with computer connected with programmable pressure signal source and programmable incubator controller which controls the temperature inside incubator by interface; make I / O of computer inside incubator as checkout port of silicon piezoresistive transducer; the computer includes system operational controller and command controller.

Description

technical field [0001] The invention relates to a calibration method and equipment for on-line programmable automatic temperature compensation of a silicon piezoresistive sensor, especially a method and equipment for automatic temperature compensation and compensation parameter calibration of a silicon piezoresistive sensor ICP for automobiles; it belongs to embedded systems in silicon Applications in signal conditioning for piezoresistive sensors, including solving [0002] The digital compensation and correction method to solve the temperature drift of the sensor, the circuit design, and the online batch debugging equipment. Background technique [0003] Silicon piezoresistive sensor is a pressure sensor element based on silicon material and made by ion diffusion process. It is a pressure sensor element with superior performance, suitable for large-scale production, low price, good linearity, widely used in industrial and civil fields, and has high measurement accuracy an...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L19/04G01L1/18G01L9/08
Inventor 杨晓林
Owner JIANGHAN UNIVERSITY