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In-circuit programmable automatic temperature compensation silicon piezoresistive transducer

A technology of temperature compensation and sensor, applied in the direction of fluid pressure measurement using piezoelectric devices, measurement of the property force of piezoelectric resistance materials, instruments, etc., can solve the problems of low automation level, achieve simple structure, low cost, The effect of high reliability

Inactive Publication Date: 2009-04-29
JIANGHAN UNIVERSITY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the production of sensitive components of silicon pressure sensors in my country has passed the customs and can be supplied in large quantities, but the design of signal conditioning circuits for automotive-grade pressure sensors, the compensation method of temperature characteristics, and the automation level of the production process are all very low. , so this huge product market with an annual output value of one billion is all monopolized by foreign products

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  • In-circuit programmable automatic temperature compensation silicon piezoresistive transducer
  • In-circuit programmable automatic temperature compensation silicon piezoresistive transducer
  • In-circuit programmable automatic temperature compensation silicon piezoresistive transducer

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Embodiment Construction

[0025] 1. Calculation principle: The temperature compensation and pressure output correction equation of the silicon piezoresistive sensor obtained through in-depth research can be digitally calculated: if you want to use a computer to process the data of the sensor temperature compensation, the most critical problem is to find a one that can Completely express the comprehensive output equation of the sensor under the influence of its relevant factors, through more than 3 years of application development and research on piezoresistive sensors, and consult a large number of literature, the output of the piezoresistive sensor is a function of the pressure and temperature it bears, i.e. V O =f(P,T). Its output equation can be expressed as: V O =V OS +△T·αV OS +P(S+△T·αS) (According to the actual situation that the accuracy requirements of automotive-grade sensors are not too high, this equation omits some quadratic items that affect the output of the sensor in order to perform...

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Abstract

The invention provides a silicon piezoresistive transducer of circuit programming auto temperature transducer which comprises silicon piezoresistive transducer unit and flush type control circuit, wherein silicon piezoresistive transducer unit is continuous voltage transducer bridge which connected with one A / D switch of CPU by transducer bridge, with the other side of A / D switch of CPU connected with voltage of total transducer bridge by over magnifying circuit; make three CPU I / O switches as SPI interface, one as PWM output, one as on-line procedure control interface, RAM memory and non-volatile memory E2PROM as a compensating parameter memory; store the calculator program of the equation: VO=VOS+delta T.alpha VOS+P(S+delta T.alpha S) into ROM of CPU as compensating parameter register, acquire four correlation parameters of temperature compensating VOS, alpha VOS, S, alpha S by silicon piezoresistive transducer which posited on the inner memory of compensating parameter memory by computing at least three different ambient temperatures between -40 DEG C And 125 DEG C.

Description

technical field [0001] The invention relates to an online programmable silicon piezoresistive sensor with automatic temperature compensation, that is, a silicon piezoresistive sensor that uses ICP (in-circuit programmable) mode for automatic temperature compensation. This sensor is especially suitable for use on automotive pressure sensors; it belongs to embedded The application of the system in the signal conditioning of silicon piezoresistive sensors, including the digital compensation circuit design and automatic temperature compensation calculation to solve the temperature drift of the sensor. Background technique [0002] Silicon piezoresistive sensor is a pressure sensor element based on silicon material and made by ion diffusion process. It is a pressure sensor element with superior performance, suitable for large-scale production, low price, good linearity, widely used in industrial and civil fields, and has high measurement accuracy and linearity at room temperature...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L19/04G01L1/18G01L9/08
Inventor 杨晓林
Owner JIANGHAN UNIVERSITY