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Surface acoustic wave gas sensor with sensitive getter layer and process for its manufacture

一种传感器、气体的技术，应用在使用声波/超声波/次声波分析流体、使用声波/超声波/次声波进行材料分析、仪器等方向，能够解决不能测量简单分子浓度、不能测量真空度、灵敏层低灵敏度等问题

Inactive Publication Date: 2007-11-14
SAES GETTERS SPA
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the sensor cannot measure the concentration of simple molecules, or even the vacuum in an evacuated environment, due to the relatively low sensitivity of its sensitive layer

Method used

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  • Surface acoustic wave gas sensor with sensitive getter layer and process for its manufacture
  • Surface acoustic wave gas sensor with sensitive getter layer and process for its manufacture

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Embodiment Construction

[0019] Referring to Fig. 1, it can be seen that the gas sensor according to the first embodiment of the present invention comprises: a piezoelectric substrate 1, and two interdigits of one or more input or output wires 4, 5 are arranged on the piezoelectric substrate The type transducers 2, 3 can be wired or wirelessly connected to circuits and / or electronic control devices. At least one layer 6 of gas-sensitive material is arranged on the surface of the substrate 1 between the two transducers 2 , 3 .

[0020] According to the invention, the sensitive layer 6 suitably contains a getter material, so that molecules absorbed by this getter material can change the frequency of the electrical signal transmitted between the transducers 2,3. Thus, with a suitable calibration curve, it is possible to measure the vacuum in an evacuated environment in which the sensor is arranged and the change in frequency is measured.

[0021] In particular, the sensitive layer 6 is a getter film who...

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Abstract

Surface acoustic wave gas sensor, in particular a vacuum or hydrogen sensor, comprising a piezoelectric substrate (1) on which at least one layer of a gas-sensitive material (6) is arranged between two inter-digital transducers (2, 3) and comprises a getter material, so that the molecules sorbed by this getter material can vary the frequency of a signal transmitted between the two transducers (2, 3). The present invention also relates to a process for manufacturing this sensor.

Description

technical field [0001] The invention relates to a gas sensor utilizing surface acoustic wave or SAW technology, in particular a vacuum or hydrogen sensor. The invention also relates to methods of manufacturing such sensors. Background technique [0002] Known gas sensors comprise SAW devices in which a layer of material sensitive to a defined gas is arranged on the piezoelectric substrate of the SAW device between its interdigital transducers. [0003] Y.J.Lee's paper "Development of a SAW gas sensor for monitoring SO 2 gas” discloses a method for measuring SO 2 Concentration sensitive cadmium sulfide layer. [0004] US 5592215 discloses a sensitive gold, silver or copper layer for measuring mercury concentration. [0005] US 2004 / 0107765 discloses a sensitive nitrocellulose layer for measuring the concentration of acetone, benzene, dichloroethane, ethanol or toluene. [0006] However, the sensor cannot measure the concentration of simple molecules, or even the vacuum i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/02G01N29/24G01N29/30G01N29/22G01N33/00C22C16/00
CPCC22C16/00Y10T29/42G01N29/30G01N2291/0256C22C7/00G01N29/228G01N2291/0423G01N29/022G01N2291/014G01N2291/021G01N29/2468G01N29/2462G01N29/22G01N29/24G01N33/00
Inventor 马柯·阿米欧迪
Owner SAES GETTERS SPA
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