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Metal thin film /foil dynamic performance critical characteristic dimension test system and method

A technology of metal thin film and characteristic scale, which is applied in the direction of testing the strength of materials by applying a stable bending force, can solve the problems that the basic mechanical theory and mechanical performance parameters are no longer applicable, and achieve the effect of easy preparation and low cost

Inactive Publication Date: 2010-05-19
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, when the scale of the material is as small as the micron level, many basic mechanical theories and mechanical performance parameters applicable to bulk materials are no longer applicable.

Method used

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  • Metal thin film /foil dynamic performance critical characteristic dimension test system and method
  • Metal thin film /foil dynamic performance critical characteristic dimension test system and method
  • Metal thin film /foil dynamic performance critical characteristic dimension test system and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] Example 1 The critical characteristic scale l of the mechanical properties of SUS304 stainless steel foil c value calculation

[0051] (1) Sample preparation

[0052] The SUS304 stainless steel foils with thicknesses of 25 μm and 50 μm after rolling and annealing were cut into 10×4mm by wire cutting 2 The sample was subjected to short-term electrolytic polishing to clean its surface, and finally 5 samples of each of the two thicknesses were prepared.

[0053] (2) Micro-bending experiments on stainless steel foil samples

[0054] Mandrels with diameters of 240 μm, 546 μm and 1000 μm were used for micro-bending experiments on foil samples with a thickness of 25 μm; for foil samples with a thickness of 50 μm, mandrels with diameters of 480 μm, 1092 μm and 2000 μm were used. Such as figure 1 As shown, fix the pusher 2 head down on the base 1, select a pair of mandrels 5 and clamp the sample 6 in between, and then put them together into the lower mold 4 of the sample loa...

Embodiment 2

[0061] Example 2 Measurement and Calculation of Critical Characteristic Scales of Mechanical Properties of Polycrystalline Copper Thin Films

[0062] (1) Preparation of samples

[0063] Use wire cutting to cut a piece of bulk polycrystalline copper material with a size of 10×4×0.5mm 3 The sample was then mechanically ground and thinned to a thickness of 0.08-0.1mm, and then electropolished to obtain two single-crystal copper thin film samples with thicknesses of 25 μm and 50 μm respectively.

[0064] (2) Micro-bending experiments on copper thin film samples

[0065] Mandrels with diameters of 240 μm, 546 μm and 1000 μm were used for microbending experiments on film samples with a thickness of 25 μm; for film samples with a thickness of 50 μm, mandrels with diameters of 480 μm, 1092 μm and 2000 μm were used. Such as figure 1 As shown, fix the pusher 2 head down on the base 1, select a pair of mandrels 5 and clamp the sample 6 in between, and then put them together into the l...

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Abstract

The invention relates to the establishment of a mechanical property critical characteristic scale test system for materials with small thickness such as metallic thin film or metallic foil. The systemprovides a complete set of test apparatuses and specific testing method to carry out a micro-bending test for a sample. The complete set of test apparatuses comprises a base, a propeller, a sample loading mold pair, a core axle, etc. The propeller is thrust to buckle the upper mold and the lower mold together, the sample receives the action of a pure bending load in the loading mold pair till thetested sample is completely bent and deformed according to the contact core axle curvature, and the mechanical property critical characteristic scale value of the material can be further obtained through working out the radius of curvature of the buckling distortion of the sample. The complete set of test apparatuses and specific testing method provided by the invention can work out the mechanical property critical characteristic scale value of the material through correctly measuring the arc curvature radius corresponding to the micro-bending deformation when loading and unloading the samplewithout calculating the size of the load applied on the sample. The complete set of apparatuses has a low fabricating cost and the testing method has a simple and easy execution.

Description

technical field [0001] The present invention relates to the construction of a test system for critical characteristic scales of mechanical properties of metal thin films or metal foils. Specifically, a microbending method is used to test the critical characteristic scales of mechanical properties of metal thin films or metal foils with micron / submicron thickness, providing A whole set of devices of the test system and a specific implementation test method. Background technique [0002] In recent years, with the continuous emergence of high-tech products, micro-electromechanical systems (MEMS) have been widely used, such as micro-accelerators for the rapid deployment of automotive airbags, micro-gears and micro-fluidic devices for drug delivery in medicine, etc. , and these MEMS devices are mostly made of metal film or metal foil materials with micron / submicron thickness. Because these microscale materials are inevitably subjected to cyclic stress caused by force, heat, elec...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N3/20
Inventor 张广平郏义征张滨
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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