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A transfer container

A container and purifier technology, applied in the direction of conveyor objects, semiconductor/solid-state device manufacturing, electrical components, etc., can solve problems such as poor cleanliness, influence of process irregularities, poor cleanliness, etc.

Inactive Publication Date: 2008-09-10
ENTEGRIS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, this method is susceptible to process irregularities because the replacement action is based on the age of use rather than the concentration of contaminants
For example, system chaos results in large volumes of poorly clean gases (such as purge gases from process tools) entering the FOUP
Poor cleanliness in the gas saturates the sorbent in the FOUP and causes the sorbent to lose efficacy before the scheduled replacement time

Method used

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Embodiment Construction

[0022] The description of preferred specific embodiments of the present invention is as follows.

[0023] The use of Standard Mechanical Interface (SMIF) systems to control the microenvironment of sensitive devices during storage and transport within manufacturing facilities has greatly improved process control and reduced contamination of the device. These improvements result in increased throughput of the device and allow for technical improvements that would not have been known had the device remained in contact with the clean room environment. Standard mechanical interface systems play a particularly important role in the contamination control of 130nm IC and 300mm VLSI wafers. Contamination control is becoming more important to semiconductor manufacturing processes as processes continue to improve with further adoption of the above technology nodes and drive towards sub-micron technology nodes. Therefore, how to enhance the standard mechanical interface system that helps...

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PUM

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Abstract

A transfer container for transferring an object between environments is described. The transfer container comprises an enclosure; a purifier comprising a purification material, the purifier attached to the enclosure, the purifier configured to purify fluid flowing into the enclosure; and a fluid propelling means, attached to the enclosure, for propelling fluid through the purifier and into the enclosure.

Description

technical field [0001] The present invention relates to the field of removing pollutants in high-cleanliness environment purification, more specifically refers to a method for purifying standard mechanical interface boxes to ensure the quality of the environment therein, especially for semiconductor devices, crystal Decontamination of round and flat panel displays and other containers that require high-cleanliness environment products, while the container interface has process tools or other sealed reaction chambers. Background technique [0002] During the fabrication of a semiconductor device, a silicon wafer undergoes several process steps to construct the different material layers required for the device. Each process step requires a separate tool to perform its work, and the wafer must be transported between these process tools. On the wafer, reductions in feature dimensions have resulted in a constant increase in the cleanliness of the gases, chemicals and environment...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677
CPCH01L21/67389H01L21/67017H01L21/67393H01L21/67109H01L21/67769
Inventor 丹尼尔·小耶尔法瑞特洛伊·B·史考金斯罗瑟·J·霍姆斯
Owner ENTEGRIS INC