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Manufacturing method of substrate with coating film, color filter, manufacturing method thereof and display device

A coating film and color filter technology, which is applied in the direction of instruments, optical filters, lighting and heating equipment, etc., can solve the problems of long time and achieve the effects of height reduction, high flatness and suppression of display unevenness

Inactive Publication Date: 2008-11-26
FUJIFILM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the method using the above-mentioned heating takes a long time for drying, and as a result, the drying process becomes a rate-limiting stage in the manufacturing process.

Method used

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  • Manufacturing method of substrate with coating film, color filter, manufacturing method thereof and display device
  • Manufacturing method of substrate with coating film, color filter, manufacturing method thereof and display device
  • Manufacturing method of substrate with coating film, color filter, manufacturing method thereof and display device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0201] "The Making of Color Filters"

[0202]

[0203] An alkali-free glass substrate (OA-10 manufactured by NEC Glass Co., Ltd.) having a size of 100 mm×100 mm×0.7 mm was washed with a UV cleaning device, brushed with a detergent, and ultrasonically cleaned with pure water. The substrate was heat-treated at 120° C. for 3 minutes to stabilize the surface state. Then, after cooling the substrate and adjusting the temperature to 23° C., a glass substrate coater with a slit nozzle was used to coat the Nippon Steel Chemical Co., Ltd. V-259 black resist material (dark resin combination). The coating speed at this time was 100 mm / sec, and the distance (gap) between the substrate and the tip of the coating head was 250 μm. After coating, bake in an oven at 120°C for 3 minutes to obtain a dark resin layer K1.

[0204] Next, using a proximity exposure machine equipped with an ultra-high pressure mercury lamp, the exposure amount was 300mJ / cm 2 The dark resin layer K1 is pattern-e...

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Abstract

The invention provides a manufacturing method of a substrate with a coating film, comprising: a coating working procedure for coating liquid on the surface of one side of the substrate having concave convex; a drying working procedure for drying the coating liquid for decompressing the atmosphere when cooling the substrate, namely is a manufacturing method of a substrate with a coating film: even if a coating film is formed on the surface with concave convex, a coating film with high flatness is formed.

Description

technical field [0001] The present invention relates to a method for manufacturing a substrate with a coating film, a color filter, a method for manufacturing the same, and a display device. Background technique [0002] In the manufacturing process of a semiconductor device or a liquid crystal display device, a step of applying a coating liquid such as a resist liquid to form a coating film is essential. [0003] As the coating method of the coating liquid, various coating methods such as a slit coating method, a spin coating method, a slit & spin coating method, a doctor blade coating method, a roll coating method, and a droplet coating method are used, for example. Here, regardless of the coating method, a step of drying the coating film after coating is necessary. Conventionally, a substrate to be dried such as a substrate coated with a coating liquid is heated and dried in an oven or a hot plate. [0004] However, the method using the above-mentioned heating requires ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/16G02B5/20G02F1/1333F26B5/04
Inventor 金子若彦
Owner FUJIFILM CORP