Wafer container with airtight door

A technology for sealing containers and containers, which is applied in the field of containers, can solve problems such as leakage of seals, and achieve the effects of reducing contact force, eliminating columnar buckling, and being easy to replace

Active Publication Date: 2011-12-07
ENTEGRIS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the problem with this approach is the "discrete cylindrical buckling" of the end section, where the free end of the end section buckles radially inwards on one section of the cut edge of the seal, but radially inwards on a section of a different cut edge. buckle outward
This condition allows the seal to leak at the transition point between inward and outward buckling

Method used

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  • Wafer container with airtight door
  • Wafer container with airtight door
  • Wafer container with airtight door

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0028] refer to Figure 1-2 A well-known wafer container 20 as a transport unit generally includes a housing member 22 and a door 24 . The housing member 22 generally includes a housing 26 forming an interior space 28 for housing a plurality of wafers 30 . The housing 26 has a pair of opposing side walls 32 , 34 , a top 36 , a bottom 38 and a back 40 . Opposite the back 40 is an open front 42 formed by a door frame 44 which receives the door 24 for tightly sealing the interior space 28 . It should be noted that "door frame" as used herein is not limited to a structure separate from the housing member 22, nor is it limited to an attached structure on or integral with the housing member 22. Conversely, "door frame" simply refers to the portion of the housing member 22 that receives the door 24 . The housing member 22 may also include a manipulator pull flange 46 on the top 36 , manual handles 48 on the side walls 32 , 34 and a kinematic hinge with grooves 49 on the outer surf...

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PUM

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Abstract

A wafer container (20) includes a housing member (22) having an opening formed by a door frame for inserting and moving wafers, and a door (24) for sealing the housing member and cooperating with the door frame. A continuous elastomeric seal (94) extends around the door within the perimeter. A seal is located on a sealing surface near the periphery of the door and is partially insertable into a radial groove (92) in the door. In cross-section, the elastomeric seal has an insertion portion (96) and a sealing head (97) joined by a bridge (98). The seal head has a base (108) projecting from the bridge toward the door sealing surface, and a head (106) extending relative to the bridge in a direction generally opposite the base. The door frame has a sealing engagement such that when the door is seated in the door frame, the bridge of the elastomeric seal contacts the sealing engagement (112) causing the bridge to move axially towards the sealing surface causing the head of the seal head to rotate radially And in contact with the sealing joint structure (118). This moving action also brings the bottom of the sealing head into contact with the door (58) sealing surface.

Description

[0001] This application claims priority to US Provisional Application No. 60 / 563,529, filed April 18, 2004, entitled "Wafer Container With Hermetic Door," which is incorporated herein by reference in its entirety. technical field [0002] This invention relates to containers, and more particularly, to sealable containers for semiconductor wafers. Background technique [0003] Semiconductor wafers go through many steps during processing. This often requires transporting large numbers of wafers between workstations or processing equipment. Semiconductor chips are fragile and easily damaged by physical contact or vibration and static electricity. Furthermore, semiconductor manufacturing processes are very sensitive to contamination by particulates or chemicals. Therefore, in order to reduce the detrimental effect of contaminants on wafers, specialized containers have been developed for minimizing the generation of contaminants and isolating wafers from contaminants outside th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65D53/02B65D43/04B65D85/00B65D85/30H01L21/00H01L21/673
CPCH01L21/67376H01L21/67126B65D85/30B65D85/38H01L21/673
Inventor 安东尼·玛索丝·堤班约翰·里斯塔
Owner ENTEGRIS INC
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