Barrel trough swirling flow mixing device and method
A technology of mixing device and swirling flow, which is applied in the field of swirling mixing devices in buckets and grooves, can solve the problems of chemical liquid pollution, difficult maintenance and cleaning, poor product quality, etc., and achieve the effect of effective treatment and improvement of mixing efficiency.
Active Publication Date: 2013-04-17
ASIA MIC PROCESS
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Problems solved by technology
[0003] However, the blades driven by electricity are often immersed in the chemical raw material liquid for a long time. Over time, different chemical raw materials will be adsorbed on the blades, which is not only difficult to maintain and clean, but also easily causes the purity of the chemical raw material tank. In addition, due to the high erosiveness of the chemical raw materials, the blades are corroded, falling into the chemical liquid and mixed with the chemical liquid, which will pollute the chemical liquid in the chemical raw material tank, resulting in poor quality products
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[0024] The tank swirl mixing device and method thereof according to preferred embodiments of the present invention will be described below with reference to the relevant drawings. For ease of understanding, the same components in the following embodiments are denoted by the same reference numerals.
[0025] figure 1 is a schematic diagram showing the three-dimensional structure of the tank swirl mixing device according to the first embodiment of the present invention; figure 2 is a schematic diagram showing the three-dimensional structure of the tank swirl mixing device according to the second embodiment of the present invention; image 3 is a schematic diagram showing the three-dimensional structure of the tank swirl mixing device according to the third embodiment of the present invention; Figure 4 is a schematic diagram showing the three-dimensional structure of the tank swirl mixing device according to the fourth embodiment of the present invention; Figure 5 is a sche...
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The invention discloses a tank swirling flow mixing device and a tank swirling flow mixing method. The device comprises a body, the bottom of which is provided with a chemical liquid output passage, at least one nozzle connected to the body, at least one chemical liquid conveying device connected to the chemical liquid output passage and the nozzle, and a pressure pump positioned on the chemical liquid conveying device, wherein chemical liquid is filled in the body, has a horizontal plane, and is delivered to the chemical liquid output passage through the driving of the pressure pump, then delivered to the nozzle through a water inlet pipe, the pressure pump and a water outlet pipe, and finally jet by the nozzle, so that the chemical liquid in the body forms swirling flow to achieve the effect of evenly mixing the chemical liquid.
Description
technical field [0001] The invention relates to a tank swirl mixing device and method, more specifically, to the field of chemical liquid mixing. Background technique [0002] Recently, semiconductor technology is changing with each passing day, and the supply of semiconductor raw materials has also become more advanced. The early manual feeding method has evolved into a mechanical method, and now it has evolved into an electronic automation method. In order to make the chemical liquid used as semiconductor raw material fully mixed and not easy to solidify, traditionally, a plurality of blades are driven by an electric motor, and then rotated by a plurality of blades to mix at least one chemical liquid in the chemical raw material tank, so that at least one The chemical liquid achieves the purpose of mixing and not easy to crystallize. [0003] However, the blades driven by electricity are often immersed in the chemical raw material liquid for a long time. Over time, differ...
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IPC IPC(8): B01F5/04
Inventor 徐宏信林志杰黎源欣
Owner ASIA MIC PROCESS