Process and apparatus for the modification of surfaces

Abstract

The present invention relates to a process for coating a substrate with a wear resistant layer on the basis of carbon comprising the steps of: i) providing a substrate containing a material which has an affinity for carbon, ii) cleaning a surface of the substrate, iii) deposition of a metal containing layer on the surface, iv) ion-bombarding the coated surface, v) deposition of a carbon layer on the surface. Further, the present invention relates to a substrate with a diamond-like carbon coating on the surface of the substrate and an apparatus for carrying out the process according to the invention.

Description

technical field [0001] This invention relates to the application of coatings in a vacuum, and more particularly to devices for generating plasmas of electrically conductive materials. The apparatus is used to practice a method of providing a substrate with a diamond-like carbon coating, wherein the carbon coating improves the hardness, machinability and wear resistance of the substrate. In addition, the present invention also relates to a drilling device for performing processing such as routing, slitting, drilling, etc. on a printed circuit board and for machining of non-ferrous metal materials such as Al, Cu, and the like. Background technique [0002] Coating with diamond-like carbon is well known in the art. [0003] WO 2004 / 083484 A1 describes the possibility of depositing nanocrystalline diamond-like materials on substrate surfaces by means of CVD (Chemical Vapor Deposition) techniques, in particular for obtaining these standard carbon-like materials on the surface of...

AI Technical Summary

Problems solved by technology

Overheating of the cutting edge, for example, reduces its mechanical properties

[0010] It should be noted that, to the applicant's knowledge, there are currently no coated microtools on the market, in particular microdrills < 0.2 mm in diameter

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