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Functional array element with self-alignment electrode structure and manufacturing method thereof

A technology of electrode structure and manufacturing method, which is applied in the direction of electrical components, semiconductor/solid-state device manufacturing, and electrical solid-state devices, and can solve problems such as inconsistencies in pixel areas

Inactive Publication Date: 2009-12-23
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

And as the device density increases and the size shrinks, alignment errors are very likely to occur, causing the spacer 15' to deviate from its proper position, resulting in inconsistencies in the pixel area, such as Figure 1C shown

Method used

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  • Functional array element with self-alignment electrode structure and manufacturing method thereof
  • Functional array element with self-alignment electrode structure and manufacturing method thereof
  • Functional array element with self-alignment electrode structure and manufacturing method thereof

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Embodiment Construction

[0061] The following examples are described with various embodiments and accompanying drawings as a reference basis of the present invention. In the drawings or descriptions in the specification, the same figure numbers are used for similar or identical parts. And in the drawings, the shape or thickness of the embodiments may be enlarged, and marked for simplicity or convenience. Furthermore, the parts of the components in the drawings will be described separately. It should be noted that the components not shown or described in the drawings are forms known to those skilled in the art. In addition, specific embodiments only The specific method used in the present invention is disclosed, and it is not intended to limit the present invention.

[0062] According to an embodiment of the present invention, there is provided a functional array element with a self-aligned electrode structure and a manufacturing method thereof. A self-aligned spacer structure is formed by using a pat...

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Abstract

The invention provides a functional array element with a self-alignment electrode structure and a manufacturing method thereof. The functional array element comprises a transparent base plate, wherein patterning array type bottom electrodes are arranged on the transparent base plate, a gap wall structure is arranged on the transparent base plate and positioned at a gap between the patterning array type bottom electrodes, and the patterning array type bottom electrodes are automatically aligned; a functional structure layer is arranged in a pixel array area defined by the gap wall structure, apatterning top electrode is arranged on the functional structure layer and positioned in the pixel array area, and a protective layer is arranged on the patterning top electrode and covers the functional array element.

Description

technical field [0001] The invention relates to a functional array element, in particular to a functional array element with a self-aligned electrode structure and a manufacturing method thereof. Background technique [0002] Conventional functional array elements include piezoelectric sensing devices, display devices, actuator devices, speaker devices, or other photoelectric sensing devices, and their size continues to be miniaturized and the effective pixel area is increased. A typical functional array element mainly includes three parts: a substrate, a spacer, and a functional structural layer of a sensing element. The pixel array area is defined by the spacers, and the functional structure layer of the sensing element is formed in each pixel area. Therefore, the efficiency and accuracy of defining and forming the pixel area become the key to the functional array element. [0003] US Patent Early Publication No. 2004 / 0039044 discloses a self-aligned red-green-blue color ...

Claims

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Application Information

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IPC IPC(8): H01L27/12H01L21/84
Inventor 侯智升侯维新
Owner IND TECH RES INST