Preparation of organic light emitting diodes by a vapour deposition method combined with vacuum lamination
A light-emitting diode, organic technology, applied in semiconductor/solid-state device manufacturing, electrical components, electric solid-state devices, etc., can solve the problem of low mechanical adhesion
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[0018] In one embodiment of the present invention, there is provided a method of manufacturing an OLED comprising the steps of: providing first and second substrates; removing dust particles from said substrates; coating the first and second substrates respectively by vapor deposition; and a second substrate; and laminating the first and second substrates together under vacuum.
[0019] Dust particles on the substrate can be largely removed by several methods or combinations thereof. In an exemplary embodiment, dust particles can be removed by, for example, megasonic or ultrasonic cleaning in ultrapure water. In another exemplary embodiment, the dust particles can be removed by charging the dust particles and removing the at least partially charged dust particles in an electric field.
[0020] In an exemplary embodiment, the dust particles can be negatively charged with a beam of electrons that can be generated, for example, by a differentially pumped electron gun, similar to...
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