Configurable two-dimensional micro-plasma array device and preparation method thereof

Abstract

The invention discloses a configurable two-dimensional micro-plasma array device and preparation method thereof. The device consists of at least two electrode layers and at least one micro-cavity layer which are stacked, the layers are contacted closely, the electrode layers are on the two outermost sides, and the electrode layers and the micro-cavity layer are all provided with at least two positioning holes and are aligned through the positioning holes; a conductive material sheet of a dielectric layer or an insulation sheet made of insulation material is covered on the surface of the micro-cavity layer; the edge of the micro-cavity layer is provided with sunken linear array micro-cavities, and the micro-cavities are isolated by a barrier; the electrode layers are the conductive material sheets; and electrodes are led out from the micro-cavity layer and the electrode layers respectively. The preparation method comprises the following steps: cutting a sheet material into the same rectangular sheets serving as the electrode layers and the micro-cavity layer, aligning the electrode layers with the micro-cavity layer, and assembling the electrode layers and the micro-cavity layers layer by layer as required. The size of a micro-plasma array can be flexibly changed, the process difficulty and cost are lowered, and the device array density, device size and reliability are improved.

Description

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AI Technical Summary

Benefits of technology

This technology uses small sheets made up from plastic or metal that can be easily assembled into different shapes for use with electronic devices such as sensors. These sheets have tiny holes on them which allow charged particles like electrons to pass through without being blocked by other objects during operation. By doing this they make it easier and more flexible than traditional methods used to create arrays. They also reduce manufacturing costs while maintaining their effectiveness at detecting certain types of chemical substances.

Problems solved by technology

This patented describes various technical problem addressed in these inventors' documents relating to improving the stability and performance of tiny electrically charged particles (called "molten atoms") during their formation within an ambient atmosphere called a "microsphere." These miniature objects may cause damage or contamination when they enter another environment where harmful substances exist that could affect human health if released from them. Micropolar Plasmons (MP) represent one type of atom which generates strong electric fields at low temperatures without being affected by external factors like sunlight. By focusing certain types of MIPS onto specific areas around the nanoparticles, we aimed towards creation of smaller and less expensive systems capable of detecting minute amounts of materials present inside environments.

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