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Configurable two-dimensional micro-plasma array device and preparation method thereof

A micro-plasma and array technology, applied in cold cathode manufacturing, electrode system manufacturing, discharge tube/lamp manufacturing, etc., can solve the problems of high cost, complicated process, inability to take into account large size and addressability, etc. Improve array density, reduce process difficulty and manufacturing cost, and improve the effect of size flexibility and variability

Inactive Publication Date: 2011-11-09
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the technical deficiencies that the current micro plasma cannot take into account both large size and addressability, complicated process and high cost, and provide a low-cost, large-size, high-resolution, high-reliability, addressable Assembled two-dimensional microplasma array device and preparation method thereof

Method used

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  • Configurable two-dimensional micro-plasma array device and preparation method thereof
  • Configurable two-dimensional micro-plasma array device and preparation method thereof
  • Configurable two-dimensional micro-plasma array device and preparation method thereof

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Embodiment 1

[0032] Such as figure 1 and figure 2 As shown, the assembleable two-dimensional micro-plasma array device of the present invention is composed of an electrode layer 100 and a microcavity layer 200, and the thickness of each layer can range from 1 micron to several thousand microns. Both the electrode layer 100 and the microcavity layer 200 include at least two positioning holes 300 , the electrode layer 100 and the microcavity layer 200 are stacked alternately, and the positioning holes 300 of each layer must be aligned. The outermost part of the device is the electrode layers 100(0) and 100(N), the zeroth electrode layer 100(0) is connected to the first microcavity layer 200(1), aligned through the positioning holes, the two are in close contact, Leave no gaps in between. The first electrode layer 100(1) is connected to the first microcavity layer 200(2), aligned through the positioning holes, and they are in close contact with each other without leaving a gap in between. ...

Embodiment 2

[0035] In this embodiment, two bus electrodes are provided on the basis of Embodiment 1. Such as image 3 As shown, the odd-numbered layers 100(1), 100(3), ... in the electrode layers are connected to the first bus electrode 601, and the even-numbered layers 100(0), 100(2), ... in the electrode layers are connected to the first bus electrode 601. The two bus electrodes 602 are connected, and a microcavity layer is included between each even-numbered layer and each odd-numbered layer in the electrode layer, and an AC voltage or a DC voltage is applied between the first bus electrode 601 and the second bus electrode 602, so that Array discharges.

Embodiment 3

[0037] In this embodiment, on the basis of Embodiment 2, a third bus electrode is added. Such as Figure 4 As shown, there is a microcavity layer between each even-numbered layer and every odd-numbered layer in the electrode layers, and the microcavity layers 200 ( 1 ), 200 ( 2 ), . . . are connected to the third bus electrode 603 . Applying an AC voltage or a DC voltage between the first bus electrode 601 and the second bus electrode 602 can be used as a discharge sustaining electrode and is responsible for maintaining the discharge state; the third bus electrode 603 can be used as an address electrode, and the row is set as the required point To light or not to light.

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Abstract

The invention discloses a configurable two-dimensional micro-plasma array device and preparation method thereof. The device consists of at least two electrode layers and at least one micro-cavity layer which are stacked, the layers are contacted closely, the electrode layers are on the two outermost sides, and the electrode layers and the micro-cavity layer are all provided with at least two positioning holes and are aligned through the positioning holes; a conductive material sheet of a dielectric layer or an insulation sheet made of insulation material is covered on the surface of the micro-cavity layer; the edge of the micro-cavity layer is provided with sunken linear array micro-cavities, and the micro-cavities are isolated by a barrier; the electrode layers are the conductive material sheets; and electrodes are led out from the micro-cavity layer and the electrode layers respectively. The preparation method comprises the following steps: cutting a sheet material into the same rectangular sheets serving as the electrode layers and the micro-cavity layer, aligning the electrode layers with the micro-cavity layer, and assembling the electrode layers and the micro-cavity layers layer by layer as required. The size of a micro-plasma array can be flexibly changed, the process difficulty and cost are lowered, and the device array density, device size and reliability are improved.

Description

technical field [0001] The invention relates to an assembleable two-dimensional micro-plasma array device and a preparation method thereof, belonging to the field of micro-plasma array devices. Background technique [0002] Weakly ionized plasmas near conventional atmospheric pressure are very unstable and are particularly prone to arcing. However, by confining the working gas to a micron-scale space, a stable glow discharge can be generated. The plasma produced by such discharges is often referred to as "microplasma". Microplasma has the characteristics of weak ionization, boundary-dominated phenomena, and high particle concentration, and has been paid more and more attention by researchers. [0003] The applications of microplasma are developing rapidly, and the most common ones include display, biomedical diagnosis and environmental sensing. It is often used as a source of ultraviolet radiation and as a source of ions. In terms of environmental governance, it is mainl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J17/38H01J9/00
Inventor 孟令国邢建平蒋然林兆军王卿璞
Owner SHANDONG UNIV
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