Piezoelectric or electrostrictive element and manufacturing method of the same
一种制造方法、电致伸缩材料的技术，应用在压电/电致伸缩器件的制造/组装、压电器件/电致伸缩器件、压电/电致伸缩/磁致伸缩器件等方向，能够解决伸缩层开裂、超过响应范围等问题
Inactive Publication Date: 2010-08-04
NGK INSULATORS LTD
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Problems solved by technology
[0012] However, in this type of piezoelectric / electrostrictive element, if the characteristics of the piezoelectric / electrostrictive element (such as induction sensitivity) are improved due to an increase in the amount of flexural displacement or the value of internal stress, the problem of durability , such as cracks in the piezoelectric / electrostrictive layer, etc. will appear
In this case, the output or resonant frequency of the piezoelectric / electrostrictive element becomes significantly beyond the response range, and the element can no longer be used as a sensor
Method used
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Embodiment 1
[0050] A piezoelectric / electrostrictive element 10 was prepared in which the coverage of the lower electrode layer 12 was 80%, and the primary resonance frequency was detected using a network analyzer. After that, it was confirmed that the application of a DC voltage of 200 V for several minutes generated cracks in the piezoelectric / electrostrictive layer 13 . Then, the change rate of the resonance frequency is obtained according to the resonance frequency before and after the crack is generated. The results are shown in Table 1.
[0051] Table 1
[0052]
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There is disclosed a piezoelectric / electrostrictive element which can be used as a sensor, even if a piezoelectric / electrostrictive layer cracks. Provided is a piezoelectric / electrostrictive element 10 comprising a substrate 11, a lower electrode layer 12 secured onto the substrate 11, and a piezoelectric / electrostrictive layer 13 secured onto the lower electrode layer 12, and the coverage of the lower electrode layer 12 with respect to the substrate 11 is 98% or less.
Description
technical field [0001] The present invention relates to a piezoelectric / electrostrictive element having an electrode layer provided on a substrate and a piezoelectric / electrostrictive layer provided on the electrode layer, and a manufacturing method thereof. Background technique [0002] In the piezoelectric / electrostrictive element, for example, an electrode layer mainly composed of metal is fixed on the surface of a (ceramic) substrate mainly composed of zirconium, and a piezoelectric / electrostrictive layer ( See patent document 1). [0003] Such a piezoelectric / electrostrictive element can be manufactured by first forming a coating that can become the first layer of the electrode layer on the surface of the substrate; A second layer of stretchable material (which will be the piezoelectric / electrostrictive layer); followed by heating and firing at a predetermined temperature, followed by cooling. The electrode layer itself can be formed directly as the first layer from t...
Claims
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IPC IPC(8): H01L41/08H01L41/047H01L41/24H01L41/09H01L41/18H01L41/187H01L41/22H01L41/29H01L41/43
CPCH01L41/0973H01L41/047H01L41/29H01L41/43Y10T29/42H10N30/877H10N30/87H10N30/2047H10N30/074H10N30/06
Inventor 大西孝生梅田勇治后藤直树
Owner NGK INSULATORS LTD