Unlock instant, AI-driven research and patent intelligence for your innovation.

Electrically programmable fuse using anisometric contacts and fabrication method

A manufacturing method, varying technology, applied in the field of electrically programmable fuses, which can solve the problems of increasing thermal mass, high programming current, increasing the risk of contact deterioration, etc.

Inactive Publication Date: 2013-11-06
GLOBALFOUNDRIES INC
View PDF12 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Large contact lands of conventional fuses also increase thermal mass, require high programming currents and increase risk of contact degradation

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Electrically programmable fuse using anisometric contacts and fabrication method
  • Electrically programmable fuse using anisometric contacts and fabrication method
  • Electrically programmable fuse using anisometric contacts and fabrication method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] Turning now to the more detailed drawings, it can be seen that Figures 1A and 1B illustrate conventional electrically programmable fuses 20 and 30, respectively. In FIG. 1A , a conventional e-fuse 20 includes an array of symmetrical contacts 25 arranged in a 3×3 arrangement, while in FIG. 1B a conventional e-fuse 30 includes an array of symmetrical contacts 35 arranged in a 2×1 arrangement. array of . It can be seen in FIGS. 1A and 1B that the contact areas formed by the contacts 25 and 35 respectively have a large contact processing area. One problem associated with such conventional electrically programmable fuses is possible contact degradation during electromigration when a programming current is applied to the fuse and heat is applied to the contacts.

[0019] In order to eliminate some of the problems such as contact degradation associated with the conventional e-fuse in FIGS. 1A and 1B , according to an embodiment of the present invention, there is provided fig...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

An electrically programmable fuse that includes an anode contact region and a cathode contact region are formed of a polysilicon layer having a silicide layer formed thereon, and a fuse link conductively connecting the cathode contact region with the anode contact region, which is programmable by applying a programming current, and a plurality of anisometric contacts formed on the silicide layer of the cathode contact region or on both the silicide layer of the cathode contact region and the anode contact region in a predetermined configuration, respectively.

Description

technical field [0001] The present invention relates to electrically programmable fuses, and more particularly, to electrically programmable fuses including anisometric contacts and methods of manufacturing the same. Background technique [0002] Electrically programmable fuses have been used in many advanced technologies within the semiconductor industry. These fuses are used in various integrated circuit applications such as implementation of array redundancy, field programmable arrays and on-chip ID, and analog trimming circuits. For example, these fuses can be programmed to store data on the integrated circuit, adjust components on the circuit, or program logic on the circuit. In a typical e-fuse, the contacts are arranged symmetrically for ease of printing and to optimize contact processing. The term symmetric means that the number of contacts and the shape of the contacts are primarily square (ie, symmetrical). Conventional fuses also typically have large landing re...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G11C17/16G11C17/08
CPCH01L23/5256H01L2924/0002H01L2924/00
Inventor C·科塔达拉曼D·莫伊N·W·罗布森J·M·沙夫兰
Owner GLOBALFOUNDRIES INC