Split type parallel microchannel radial gas static-pressure throttleer
A gas static pressure and restrictor technology, applied in bearings, shafts and bearings, mechanical equipment, etc., can solve the problems of low stiffness and large gas film vibration, and achieve the goal of improving stiffness and stability and reducing gas film vibration Effect
Inactive Publication Date: 2011-12-28
CHINA JILIANG UNIV
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Problems solved by technology
[0004] In order to overcome the problems of large gas film vibration and low rigidity caused by traditional gas static pressure radial restrictors, the purpose of the present invention is to provide a split type parallel microchannel radial gas static pressure restrictor
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Embodiment Construction
[0022] Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0023] like figure 1 and figure 2 As shown, the split-type parallel microchannel radial gas static pressure restrictor is composed of a restrictor main body 1 and a matching plug 2 . The restrictor main body 1 is in the shape of a cuboid, and its upper surface is a first concave curved surface 10. There are multiple air outlet grooves 3 on the upper surface, and a pair of side surfaces of the restrictor main body 1 are provided with air inlets that pass through the restrictor main body 1. Hole 4; Assembly hole 5 is provided on the other pair of sides;
[0024] like figure 1 , Figure 5 and Image 6 As shown, the fitting plug 2 is located in the main body of the restrictor 1, and its longitudinal section is Y-shaped. The curvature of the curved surface 10 is the same as that of the second concave curved surface 11 . An orifice 6 is provi...
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Abstract
The invention relates to a split type parallel microchannel radial gas static-pressure throttleer. The traditional throttleer is difficult to satisfy the requirements of superstability and high intensity of a system at the same time. The throttleer comprises a throttleer main body and a matched plug, wherein the throttleer main body is in a rectangular shape, an upper surface of the throttleer main body is a concave curved surface, a plurality of air outlet grooves are arranged on the upper surface, a pair of side surfaces of the throttleer main body is provided with gas inlets which pass through the throttleer main body, and the other pair of side surfaces of the throttleer main body is provided with assembling holes; the matched plug is positioned in the throttleer main body, the longitudinal section of the matched plug is in a Y shape, the upper surface of the matched plug is a concave curved surface which has the same curvature with the upper surface of the throttleer body, the center of the upper surface is provided with an orifice, the curvature of the surrounding curved surfaces of the orifice is larger than the curvature of the concave curved surface, the surrounding side walls of the matched plug are provided with microchannels, and a lug boss which is used for positioning is arranged between the bottom surface of the matched plug and the throttleer main body. Due to the adoption of the split type parallel microchannel radial gas static-pressure throttleer, a formed static-pressure system gas film has larger rigidity and higher stability.
Description
technical field [0001] The invention belongs to the field of gas static pressure lubrication and relates to a split type parallel microchannel radial gas static pressure restrictor. Background technique [0002] In the field of ultra-precision machining and ultra-precision detection technology, both precision machining machinery and measuring instruments have proposed high precision, high speed, high motion resolution, good thermal stability, low vibration, small crawling, and Strict requirements for less pollution and lower equipment costs. It has been found in practice that the aerostatic bearing is an important way to solve the above-mentioned stringent requirements. Due to the compressibility of gas itself, it is very difficult to improve the stiffness of gas lubrication. Improving the stiffness of aerostatic bearings is one of the difficulties and hotspots in the research field of aerostatic bearings, and it is a frontier issue. Microelectronic equipment, ultra-preci...
Claims
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Login to View More IPC IPC(8): F16C32/06
Inventor 李东升张雯陈爱军禹静郭天太
Owner CHINA JILIANG UNIV