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120 results about "Aerostatic bearing" patented technology

Ultra-sophisticated aerostatic motorized spindle system

The invention provides an ultraprecise aerostatic electric spindle system which relates to an electric spindle system. The invention solves the problems that in the spindle system of current ultraprecise processing devices, rotation accuracy is poor; direct drive can not be realized and transmission effects of the power of an electric motor and a spindle are unfavorable. A motor shaft (14) on a DC brushless drive motor (15) is fixedly connected with the upper end face of an upper thrust plate (3); the spindle (4) and a spindle sleeve (5) are positioned between the upper thrust plate (3) and a lower thrust plate (6); the spindle sleeve (5) is sleeved on the spindle (4); the lower end face of the upper thrust plate (3) is fixedly connected with the upper end face of the spindle (4); the lower end face of the spindle (4) is fixedly connected with the upper end face of the lower thrust plate (6). The motor shaft (14) and the spindle (4) are coaxial; the spindle sleeve (5) is opened with a plurality of radial restriction orifices (8-1) and a plurality of axial restriction orifices (8-2). In the invention, an aerostatic bearing is used as an axial support and a radial support, which guarantees the rotation accuracy of the spindle; the aerostatic bearing has the effect for homogenizing the geometric accuracy of the spindle and the spindle sleeve so that shafting has extremely high rotation accuracy.
Owner:HARBIN INST OF TECH

Ct scanner gantry with aerostatic bearing and segmented ring motor

Disclosed is a device having a rotor that is adapted to be rotated relative to a stator, with hydrostatic bearings being used as radial bearings and as axial bearings of the rotor. A motor is provided as a direct drive, having a ring-shaped part and also a plurality of motor segments which are in magnetic engagement with the ring-shaped part. In order to generate additional bearing load force, additional motor segments having permanent magnets are provided. For reasons of safety, axial support rolls are provided which, when the motor has attained a given bearing load force, are spaced from a running face of the rotor, and which, in a case of too low or an absence of load force, prevent a displacement of the rotor away from the axial bearings.
Owner:SCHLEIFRING & APPBAU

Torque test air support rotating platform for control torque gyro

The invention relates to control moment gyro using moment testing gas floating rotate table that includes air hydrostatic bearing, main shaft encoder, workbench and torquer. The main shaft encoder is used to testing the angle location; the workbench is used to install testing object and the torguer is installed on the bottom of the air hydrostatic bearing to drive main shafting. The pressure of air hydrostatic bearing would be adjusted by pressure adjustor. The invention has the advantages of low attrition disturbance, easy to operate, convenience and high accuracy.
Owner:BEIHANG UNIV

Gas-magnet mixing suspended planar motor with easily expanded horizontal stroke

The invention relates to a gas-magnet mixing suspended planar motor with easily expanded horizontal stroke, comprising a stator basal body arranged along a horizontal XY plane and a mover basal body suspended on the stator basal body and is parallel with the stator basal body. Two degrees of freedom Halbach permanent magnet arrays with wavelengths along the axis X and the axis Y directions are embedded on the surface of the stator basal body; each pair of magnetic poles of the two degrees of freedom Halbach permanent magnet arrays are formed by arraying first magnet to sixth magnet according to a four* four matrix; four corners of the lower surface of the mover basal body are respectively provided with a first thrust winding, a second thrust winding, a third thrust winding and a fourth thrust winding, wherein the wavelength direction of the first thrust winding and the third thrust winding are in the axis X direction; the wavelength direction of the second thrust winding and the fourth thrust winding are in the axis Y direction; four sides of the lower surface of the mover basal body are respectively provided with a first aerostatic bearing air-cushion, a second aerostatic bearing air-cushion, a third aerostatic bearing air-cushion and a fourth aerostatic bearing air-cushion.
Owner:SOUTHEAST UNIV

Mixed type helical groove dynamical and static pressure gas composite thrust bearing

The "hybrid spiral groove dynamic and static pressure gas composite thrust bearing" of the present invention relates to a high-speed, high rigidity, large load ultra-precision spiral groove dynamic and static pressure gas composite thrust bearing. There are herringbone dynamic pressure grooves on both sides of the air point distribution circle. Without increasing the air consumption of the air bearing, the bearing capacity is more than 30% higher than that of the traditional static pressure air bearing, and the bearing stiffness is higher than that of the traditional static pressure air bearing. The bearing is improved by more than 15%.
Owner:HARBIN INST OF TECH

Centrifugal compressor assembly and method of operation with an airconditioner

A centrifugal compressor assembly and method of operation provides a motor that drives a first stage compressor. The motor comprises a rotor. The motor uses radial aerostatic bearings to stabilize rotation and axial displacement of the rotor. The motor also uses a thrust aerostatic bearing to balance an axial force of the rotor. The radial aerostatic bearings and the thrust aerostatic bearing use a low-viscous vapor-liquid two-phase fluid as a lubricating medium. The radial aerostatic bearings supports the rotor. The thrust aerostatic bearing uses porous aerostatic bearings that use a low-viscous vapor-liquid two-phase fluid, so as to reduce radial and axial oscillation of the rotor. This enables clearance between a blade tip of an impeller and a volute. This causes a seal clearance to be reduced by a half; thereby increasing efficiency of the centrifugal compressor by at least 10 percent.
Owner:ZHEJIANG FLOWTECH INC

Aerostatic bearing guiding cylinder without friction interference

InactiveCN102374208AThe output thrust is accuratePrecise and constant output thrustFluid-pressure actuatorsRubber ringEngineering
The invention relates to an aerostatic bearing guiding cylinder without friction interference. In the cylinder, a sliding guiding structure and a rubber ring sealing structure adopted by the traditional cylinder mechanism are changed, linear aerostatic bearing guiding replaces the traditional sliding guiding, and clearance sealing replaces the traditional rubber ring sealing, thus, a frictional force generated when a piston and a piston rod move relatively is greatly reduced, the influence of friction interference force on movement precision is weakened, and the accurate and precise control capacity of the acting force of the cylinder is improved.
Owner:CHINA PRECISION ENG INST FOR AIRCRAFT IND AVIC

Automatic tool tilting apparatus for a scribe tool

An automatically programmable tilting mechanism for holding a scribe tool at varying angles using an aerostatic bearing. The air bearing secures the scribe tool about its longitudinal shank and generally allows for free axial movement while the tool holding structure prevents rotation of the scribe tool, thus providing extremely fine compliance and force application of the scribe tool point against the substrate. During a scribing process, the tilting mechanism regularly adjusts the angle of the scribe tool relative to the substrate so that a fresh cutting edge is always being employed in the scribing process.
Owner:LOOMIS INDS

Decoupled planar positioning system

A planar positioning system having a rigid base, and first and second linear actuator means mounted to the rigid base, the first and second linear actuator means being arranged orthogonal to one another. A rigid reference surface (2A, 2B) is mounted to the base, (1) and a moveable platform (17) for holding a workpiece is supported for movement on the rigid reference surface (2A, 2B). First and second guiding means are coupled to moveable portions of the respective first and second actuator means, the first and second guiding means being arranged to bear on the moveable platform for transmission of forces thereto from the respective first and second actuator means to effect movement of the platform (17) on said rigid reference surface (2A, 2B). The first actuator means may comprise two linear actuators (4A, 4B) parallel to one another and spaced apart with the second linear actuator means (8) orthogonal thereto and arranged in an H-shaped configuration. The first and second guiding means and / or the components of the moveable platform (17) against which they bear are preferably constructed for low frictional movement in the direction orthogonal to the transmission of forces therefrom, such as by the use of non-contact aerostatic bearings (16A, 16B, 16C) or the like. Similarly, low friction bearings are utilised between the moveable platform (17) and the reference surface (2A, 2B).
Owner:AGENCY FOR SCI TECH & RES

CT scanner gantry with aerostatic bearing and segmented ring motor

Disclosed is a device having a rotor that is adapted to be rotated relative to a stator, with hydrostatic bearings being used as radial bearings and as axial bearings of the rotor. A motor is provided as a direct drive, having a ring-shaped part and also a plurality of motor segments which are in magnetic engagement with the ring-shaped part. In order to generate additional bearing load force, additional motor segments having permanent magnets are provided. For reasons of safety, axial support rolls are provided which, when the motor has attained a given bearing load force, are spaced from a running face of the rotor, and which, in a case of too low or an absence of load force, prevent a displacement of the rotor away from the axial bearings.
Owner:SCHLEIFRING & APPBAU

Aerostatic bearing and method for production thereof

An aerostatic bearing comprises a guide element (1) provided with drillings (15) and a body (4) which may be moved along a surface of the guide element (1). The drillings (15) comprises a first section (16) adjacent to the body, of which at least a part region has an essentially constant cross-sectional area over the length thereof, which is less than a cross-sectional area of a region remote from the body.
Owner:BSH BOSCH & SIEMENS HAUSGERAETE GMBH +1

Ultrahigh-precision aerostatic bearing main shaft system

The invention discloses an ultrahigh-precision aerostatic bearing main shaft system comprising a rotating shaft (1), a main shaft box (2) and a main shaft box end cover (3), wherein the rotating shaft (1) is installed in the main shaft box (2), is supported by means of an aerostatic bearing and rotates relative to the main shaft box (2), and the aerostatic bearing is integrated in the main shaft box (2) and is integrated with the main shaft box, therefore, a simplest structure is realized. The main shaft box (2) is internally provided with a thrust boss (28) and an axial air film gap for connecting the main shaft box end cover (3) and forming a thrust bearing. The inner surface (2a) of the main hole cavity of the main shaft box (2) is provided with a vacuum annular groove (25) which is arranged between two air exhaust grooves (24), the main shaft box (2) is provided with a vacuum port (29) which forms a connected vacuum air path together with a radial hole (13) and a central hole (11)which are arranged in the rotating shaft (1), and when installed on the end face of the rotating shaft, a vacuum chuck can be used for absorbing workpieces.
Owner:HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL

Apparatus With a Directly Driven Rotating Body and Aerostatic Bearings

A device having a directly driven rotating body (1), its circumference (11) being radially seated on radial bearings (4, 4′) in relation to the stationary body (2), and its at least one first face side (10) being axially seated in relation to the stationary body (2), wherein aerostatic bearings (5, 5′, 5″) are provided for the axial support mounting, characterized in that the first face side (10) has an annular magnet arrangement (32), which is configured coaxially to the axis of rotation (X) of the rotating body (1), and that the stationary body (2) has at least one electric coil arrangement (30), which is located opposite the annular magnet arrangement (32) in the axial direction and which forms together with the annular magnet arrangement (32) the components of an electrical direct drive (3) for the rotating body (1).
Owner:AEROLAS GMBH AEROSTATISCHE LAGER LASERTECHN

Exhaust gas recycling aerostatic bearing and design method thereof

The invention belongs to the technical field of precision machining and measurement, which relates to a technology of a pneumatic bearing. The aerostatic bearing comprises a main shaft, a bearing sleeve and an external exhaust manifold. A closed zero-pressure trough loop is equipped in the bearing sleeve to collect all exhaust gas, the zero-pressure trough loop on both ends of the bearing sleeve further is located in the high-pressure region between two components and separated from the external environment; the zero-pressure trough loop is connected with the external exhaust manifold through an exhaust manifold or an air vent directly, and all exhaust gas is inducted out and recycled by the external exhaust manifold. The invention firstly proposes that a closed zero-pressure trough loop is arranged in the aerostatic bearing to lead the exhaust gas and separate the exhaust gas from the measurement environment. Therefore, the influence of the measurement environment caused by the gas turbulence due to the discharge of the exhaust gas is eliminated, the measurement precision of the measuring system is remarkably improved, the structure of the aerostatic bearing is optimized, and dust is effectively from entering the bearing from the air vent, thereby the exhaust gas recycling aerostatic bearing can be widely applied to the precision machining and measurement devices.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY

Radial contained squeeze-film aerostatic bearing

The invention discloses a radial contained squeeze-film aerostatic bearing, which comprises a rotating shaft, piezoelectric patches, an inner sleeve, fastening screws and an outer sleeve, wherein the rotating shaft is arranged in the inner sleeve, a piezoelectric transducer is composed of the inner sleeve and the piezoelectric patches, the piezoelectric transducer is composed of three groups of piezoelectric patches which are uniformly distributed on the outer circumference of the inner sleeve, wherein the interval of each group of piezoelectric patches is 120 degree, the outer sleeve is sleeved outside the inner sleeve, the inner sleeve is fastened on the outer sleeve by screws. Each group of piezoelectric patch is composed of at least one sheet, which is pasted along the axial directionor radial direction of the inner sleeve. The present invention has the characteristics of uniform radial force of the rotating shaft, and has the advantages of non-contact, low wear, high precision, simple structure, no required affiliated gas source equipment and the like, and is capable of raising the bearing capacity and the rotation precision of the bearing. The present invention can be widely applied to equipments such as precision machine, instruments and meters, pneumatic suspension positioning equipments and the like.
Owner:DALIAN JIAOTONG UNIVERSITY

Spindle Apparatus

A spindle apparatus includes a rotatable first spindle (5, 32) to which a tool can be attached. The first spindle is supported in a base with high precision using an air hydrostatic bearing. The spindle apparatus further includes a second spindle (6, 33) capable of rotation about an axis substantially aligned with the axis of the first spindle, first connection means for electrically connecting a base side and the second spindle, and second connection means for electrically connecting the first spindle and the second spindle. Electrical connection between the base side and the first spindle is carried out via the first and second connection means. The first connection means is, for example, a brush (15, 36). The second connection means has a degree of mechanical freedom and is, for example, a flexible electrical wire (17, 39) or a helical spring (51).
Owner:SODICK CO LTD

Bionic air spring system

The invention discloses a bionic air spring system which comprises a passive vibration reduction component, a variable-rigidity variable-damping component, an anti-torsion vibration component, an aperture regulating mechanism and a bearing platform. The passive vibration reduction component is mounted on an environmental foundation; the variable-rigidity variable-damping component is arranged on the upper portion of the passive vibration reduction component; the anti-torsion vibration component is disposed on the periphery of the variable-rigidity variable-damping component; the lower end of the anti-torsion vibration component is fixed into the passive vibration reduction component, the bearing platform is sleeved at the upper end of the anti-torsion vibration component, and the upper end of the variable-rigidity variable-damping component is in contact with the lower surface of the bearing platform. By regulating a lead-screw transmission mechanism, aperture openness of damping holes is regulated, flow rate and velocity of fluid between a main air chamber and an auxiliary chamber are changed, and the rigidity value and the damping value of the air spring system are quantitative and adjustable. Meanwhile, three aerostatic bearings are uniformly distributed along the axis of the bionic air spring system to form the anti-torsion vibration component to simulate the three-point support attitude of both claws and the tail of a woodpecker, so that engineering adaptability and vibration reduction efficiency of bionic air springs are improved.
Owner:SHANDONG UNIV

Non-contact tonometery and device

The invention provides a non-touch intraocular pressure measuring method and a device thereof, relating to the ophthalmology field of intraocular pressure measurement. The air-float intraocular pressure measurement module is placed inside the shell, the measurement module is designed according to the theory of the aerostatic bearing in the aerodynamic lubrication technology, the pressure sensor is installed in the back wall of the shell, and the shell is fixed on the micromatic setting. The air-float intraocular pressure measurement module reaches the rated measuring distance by adopting the micromatic setting. When the air-float measurement module of the intraocular pressure is on the force balance stage, the rated area of the cornea pressure sprayed from the foreside of the spray nozzle of the air-float intraocular pressure measurement module is balanced with the applied force which is produced by the pressure sprayed from the back spray nozzle of the air-float intraocular pressure measurement module; the processor is controlled by the microprocessor, the applied force is measured by the information processing device and then the intraocular pressure value is displayed. The intraocular pressure value can be directly measured by the invention, at the same time, the whole structure design is simple, the cost of the production is low, and the invention is portable and can be utilized in various intraocular pressure measurements.
Owner:CHONGQING UNIV

Detection compensation control system for aerostatic spindle

ActiveCN108620948ASimple structureReal-time accurate detection and compensation controlMeasurement/indication equipmentsLarge fixed membersControl systemPiezoelectric actuators
The invention discloses a detection compensation control system for an aerostatic spindle. The system comprises a spindle rotor, a radial bearing, a bearing shell, a radial bearing air inlet, a thrustbearing and a thrust bearing air inlet; air passes through the radial bearing air inlet and the thrust bearing air inlet to enter a throttling hole and an air cavity, a thin air film is formed between the spindle rotor and the bearing sleeve, and in the rotation process, the spindle rotor hardly generates friction. One aerostatic spindle system, four capacitor sensors, four piezoelectric actuators and a PC are arranged; the four capacitor sensors are fixed to the aerostatic bearing shell in an axis central symmetry manner, the four piezoelectric actuators are embedded in four elastic groovesof the aerostatic spindle in an axis central symmetry manner, and a capacitor sensor detection unit and a piezoelectric actuator unit are connected with the PC; vibration signals are received by the PC terminal, a piezoelectric controller is driven, and therefore real-time detection compensation control over the aerostatic spindle can be achieved.
Owner:BEIJING UNIV OF TECH

Fluid compressor with aerostatic bearing, control system of a compressor with aerostatic bearing and method of controlling a compressor with aerostatic bearing

The present invention relates to a fluid compressor having an aerostatic bearing, to a control system of a fluid compressor having an aerostatic bearing as well as to a method of controlling a compressor, wherein the aerostatic bearing is fed by a compressed fluid accumulator (5) which is charged during the operation of the compressor (100) and discharged at the respective start to prevent damage to the bearings.; These objectives are achieved by means of a fluid compressor (100) comprising a pressurization chamber (C) and at least one fluid pressurization device (1, 2, 18), the pressurization chamber (C) and the pressurization device (1, 2, 18) being located in a housing (4), the pressurization chamber (C) having a non- pressurized inlet (10) and a pressurized outlet (20), the pressurization device (1, 2, 18) compressing the fluid collected by the non-pressurized inlet (10) and discharging it through the pressurized outlet (20), the pressurization device (1 , 2, 18) having at least one aerostatic bearing (3), the aerostatic bearing (3) comprising a floating pressurization region (33), the compressor comprising a compressed fluid accumulator (5) fluidically connectable to the pressurized outlet (20) and the floating pressurization region (33), the compressed fluid accumulator (5); being located inside the housing (4) of the compressor (100). A system for controlling a compressor (100) and the respective control method are further described.
Owner:WHIRPOOL SA

Gas film pressure vector control device for aerostatic bearing

PendingCN110030266AControllable outlet pressureRealize vector controlHydrostatic bearingsControl vectorEngineering
The invention provides a gas film pressure vector control device for an aerostatic bearing. The control device comprises a main shaft and a bearing, wherein the bearing is arranged outside the main shaft, an air film is formed in a gap area between the main shaft and the bearing, and throttling holes are uniformly distributed in the bearing; an air chamber coat sleeves outside the bearing, a closed area formed between the air chamber coat and the bearing is the air chamber, and the throttling holes communicate the air film and the air chamber; a flow control valve is arranged on the wall surface of the air chamber coat opposite to the throttling holes in a penetrating mode, the flow control valve is coaxially arranged with the throttling holes, and the valve element of the flow control valve is used for adjusting the opening degree of the throttling holes; an air inlet hole penetrates through the wall surface of the air chamber coat and is externally connected with an air inlet pipe; awireless pressure sensor is arranged in a groove formed in the inner wall of the bearing, the shape, close to one side of the main shaft, of the wireless pressure sensor is consistent with the shapeof the inner wall surface of the bearing, and namely the wireless pressure sensor and the gas film flow field do not interfere with each other; the flow control valve is connected with a wire collecting terminal through a wire harness; the control device is connected with the wire collecting terminal through an anti-interference bus; and the vector control of the gas film pressure of the aerostatic bearing can be realized.
Owner:ZHEJIANG UNIV OF TECH

Manufacturing process of porous component and porous component

ActiveCN104837584AStrong thickening abilityKeep volume percentagePorosityMulti material
This invention refers to a process for manufacturing a porous component (1) to be used as flow restrictor, whose basic foundations include the metal injection molding process, which has been enhanced in order to obtain a component with open porosity homogeneously distributed. Such flow restrictor comprises at least one porous component (1), having at least one restricting portion with some porosity dimensioned to regulate the flow of gas that flows to an aerostatic bearing of a mechanical system, such as a hermetic compressor comprised by a piston at motion in relation to a cylinder, for instance. This invention also refers to the use and production of a porous component (1) obtained by powder injection molding or powder injection molding of multi-material parts, the porous component being (1) a flow restrictor with a layer of dense material; that is, with no open pores, on the outer surface parallel to the flow direction in which the flow through the porous component (1) shall occur, allowing it to be inserted into the bearing system without interfering with the porous structure of the core (dual porosity). The invention also refers to the sealing existing between the porous component (1) and its housing.
Owner:EMPRESA BRASILEIRA DE COMPRESSORES SA (EMBRACO)

Aerostatic bearing spindles

An aerostatic bearing spindle comprising a shaft (2) journalled within an aerostatic bearing (204), the bearing comprising at least one supply port (241) for supplying gas to generate a journal gas film between the shaft and the bearing, wherein the spindle is arranged in such a way as to cause, in use, an unequal pressure profile around the bearing for causing a damping effect to control orbiting of the shaft (2) within the bearing (204) An aerostatic bearing spindle arrangement comprising an aerostatic bearing spindle and an active control system (1001) for controlling at least one of the supply of gas to the journal gas film and exit of gas from the journal gas film to controllably alter the pressure profile around the bearing (104) in use.
Owner:THE GSI GRP LLC

High-speed permanent magnetic motor assembly

InactiveUS20170338716A1Increase vapor in clearanceImprove carrying capacityGas cushion bearingsShaftsAxial thrustEngineering
A high-speed permanent magnetic motor assembly generates a magnetic field to produce mechanical output power. The assembly comprises a motor, a motor housing, and a radial bearing block. A motor housing supports a rotor and the radial bearing block with a left radial aerostatic bearing, a right aerostatic bearing, and an axial thrust aerostatic bearing. The bearings are porous aerostatic bearings that use a low-viscous vapor-liquid two-phase fluid as a lubricant, which penetrates through a porous bushing. The liquid vaporizes from pressure reduction, and part of the liquid arrives at a clearance between each of the bearings and the rotor. The liquid of the two-phase fluid is vaporized during discharge along an axial direction from the bearing. This increases the vapor in the clearance, improve a bearing capacity, retain position accuracy of an aerostatic bearing, and cool the aerostatic bearings and the rotor.
Owner:HANGZHOU WANCHEN ELECTROMECHANICAL TECH CO LTD

Modal analysis method of static pressure main spindle at micro scale

A modal analysis method of a static pressure main spindle under a micro scale includes: selecting and researching a flow factor in a rarefaction effect which can embody characteristics of air in a bearing at the micro scale; establishing an equation of pressure distribution of the aerostatic bearing, wherein the equation considers the case of the flow factor in the rarefaction effect at the micro scale; solving the equation to obtain the pressure distribution of the bearing, and then obtaining a rigidity and damping value of the bearing; taking the rigidity and damping value of the bearing calculated at the micro scale as a rigidity and damping value of a spring element, and thus embodying an effect of the bearing on a main spindle; establishing a main spindle model by a finite element analysis software ANSYS; and determining material properties and boundary conditions, and solving the model and obtaining a mode of the main spindle. According to the invention, the influences of the rarefaction effect are considered, the accuracy of the calculation is improved, so that the invention has certain theoretical guidance meaning in the research of dynamic performance of the main spindle.
Owner:BEIJING UNIV OF TECH

Accurate mechanical bearing and aerostatic bearing associated shafting

The invention provides a combined bearing system of a precise mechanical bearing and an air hydrostatic bearing. A mainshaft is a step shaft shape, which is sheathed by a transmission disc, a connecting sleeve and an adjusting lock sleeve sequentially from bottom to top; the transmission disc is connected with the connecting sleeve by a pin; the connecting sleeve is fixed with the surface of a workbench by a pin; the adjusting lock sleeve is a T-shaped ring; the upper section of the adjusting lock sleeve is connected with the mainshaft and the lower section thereof is provided with a spring; an upper bearing, a spacer bush, a lower bearing, a pressing cover and a lower nut are sheathed sequentially from the middle flange of the mainshaft to the lower end; a shaft sleeve is sheathed outside the two bearings; the flange of the mainshaft is sheathed by a sliding sleeve which is fixedly connected with the shaft sleeve; the shaft sleeve is a T-shaped sleeve; the outer convex ring of the shaft sleeve is connected with a cylinder seat; the cylinder wall of the cylinder seat is provided with an axial airway; the air outlet of the airway is distributed on the top surface of the cylinder seat; the lower part of the cylinder seat is fixed with the outer convex ring of the T-shaped shaft sleeve; a sealing ring is embedded on the bottom surface of the cylinder seat; the sealing ring is fixedly connected with the bottom surface of the cylinder seat. The invention is characterized by high precision, high rigidity, low friction, stable operation and being suitable for purification chambers.
Owner:THE 45TH RES INST OF CETC

Table guided by aerostatic bearing elements for vacuum application

The invention is directed to a table for vacuum application which is guided by means of aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.
Owner:VISTEC ELECTRON BEAM
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