Accurate mechanical bearing and aerostatic bearing associated shafting

Abstract

The invention provides a combined bearing system of a precise mechanical bearing and an air hydrostatic bearing. A mainshaft is a step shaft shape, which is sheathed by a transmission disc, a connecting sleeve and an adjusting lock sleeve sequentially from bottom to top; the transmission disc is connected with the connecting sleeve by a pin; the connecting sleeve is fixed with the surface of a workbench by a pin; the adjusting lock sleeve is a T-shaped ring; the upper section of the adjusting lock sleeve is connected with the mainshaft and the lower section thereof is provided with a spring; an upper bearing, a spacer bush, a lower bearing, a pressing cover and a lower nut are sheathed sequentially from the middle flange of the mainshaft to the lower end; a shaft sleeve is sheathed outside the two bearings; the flange of the mainshaft is sheathed by a sliding sleeve which is fixedly connected with the shaft sleeve; the shaft sleeve is a T-shaped sleeve; the outer convex ring of the shaft sleeve is connected with a cylinder seat; the cylinder wall of the cylinder seat is provided with an axial airway; the air outlet of the airway is distributed on the top surface of the cylinder seat; the lower part of the cylinder seat is fixed with the outer convex ring of the T-shaped shaft sleeve; a sealing ring is embedded on the bottom surface of the cylinder seat; the sealing ring is fixedly connected with the bottom surface of the cylinder seat. The invention is characterized by high precision, high rigidity, low friction, stable operation and being suitable for purification chambers.

Description

(1) Technical field [0001] The invention relates to a connecting shaft system, in particular to a shaft system applied to an intermittent rotary workbench of special equipment for semiconductors. (2) Background technology [0002] The main function of the precision shaft system of the intermittent rotary table of traditional semiconductor special equipment is to accurately transfer the wafer station and provide the necessary rigidity for the table during processing. Therefore, the structural type of the precision shaft system of the worktable has an extremely important influence on the wafer processing quality and processing efficiency. The precision shaft system of the intermittent rotary table used to be a precision mechanical shaft system. Its disadvantages are low precision and poor rigidity, and it can only be used in occasions where the machining accuracy is not high. There is also a traditional method that uses a hydrostatic spindle. This method overcomes the shortco...

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Problems solved by technology

[0003] The purpose of the present invention is to provide a combined shaft system of precision mechanical bearings and air static pressure bearings, to solve the technical problems that the traditional shaft system used for the intermittent rotary workbench of semiconductor special equipment has a single function and is difficult to realize ultra-precision machining in the purification room

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