Exhaust gas recycling aerostatic bearing and design method thereof

Abstract

The invention belongs to the technical field of precision machining and measurement, which relates to a technology of a pneumatic bearing. The aerostatic bearing comprises a main shaft, a bearing sleeve and an external exhaust manifold. A closed zero-pressure trough loop is equipped in the bearing sleeve to collect all exhaust gas, the zero-pressure trough loop on both ends of the bearing sleeve further is located in the high-pressure region between two components and separated from the external environment; the zero-pressure trough loop is connected with the external exhaust manifold through an exhaust manifold or an air vent directly, and all exhaust gas is inducted out and recycled by the external exhaust manifold. The invention firstly proposes that a closed zero-pressure trough loop is arranged in the aerostatic bearing to lead the exhaust gas and separate the exhaust gas from the measurement environment. Therefore, the influence of the measurement environment caused by the gas turbulence due to the discharge of the exhaust gas is eliminated, the measurement precision of the measuring system is remarkably improved, the structure of the aerostatic bearing is optimized, and dust is effectively from entering the bearing from the air vent, thereby the exhaust gas recycling aerostatic bearing can be widely applied to the precision machining and measurement devices.

Description

technical field [0001] The patent of the invention relates to an aerostatic bearing technology, which can be widely used in precision machining and measurement equipment, and belongs to the technical field of precision machining and measurement. technical background [0002] With the development of ultra-precision machining and testing technology, the realization of ultra-high-precision rotary motion and linear motion is becoming more and more important. Due to its high precision and long life, aerostatic bearings are widely used in modern ultra-precision machining machine tools and measuring instruments to achieve high-precision rotary and linear motion. [0003] The existing aerostatic bearing generally consists of a bearing sleeve and a main shaft. An air supply hole with a very small diameter is processed on the working surface of the bearing sleeve, and the main shaft is installed in the cavity of the bearing sleeve. A high pressure zone is formed in the gap with the ...

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Problems solved by technology

In precision measurement, especially in optical precision measurement, air flow disturbance will produce micro-vibration and changes in the refractive index of the air medium, seriously affecting the measurement accuracy of instruments and equipment

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