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Dust-removing apparatus and dust-removing system

A dust removal device and pressurized gas technology, applied in the direction of dispersed particle separation, chemical instruments and methods, dispersed particle filtration, etc., can solve the problems of polluted products, polluted clean rooms, etc., and achieve the effect of shortening the injection time

Active Publication Date: 2013-10-30
SHINKO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If it ends without sufficient blowing, it will pollute the environment of the clean room 32 and also pollute the product (substrate 39)

Method used

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  • Dust-removing apparatus and dust-removing system
  • Dust-removing apparatus and dust-removing system
  • Dust-removing apparatus and dust-removing system

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Experimental program
Comparison scheme
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Embodiment Construction

[0034] Hereinafter, the present invention will be described in detail based on the illustrated embodiments.

[0035] exist figure 1 Among them, C represents a clean room, and a cleaning head 1 is arranged in the clean room C. The cleaning head 1 is sprayed and inhaled by the jet flow of gas, or further ultrasonic waves are applied or ions are generated to clean the air from glass, plastic, etc., such as thin displays. , metal and other thin substrates 2 to remove foreign matter such as dust and clean them. And, the pressurized gas inlet side of the housing 1A of the cleaning head 1 is provided with a filter box 4 with a HEPA filter 3 (as a unit with a HEPA filter) to form a dust removal device 10, which is arranged on the above-mentioned Inside of clean room C.

[0036] Outside the clean room C, a gas circulation drive unit 11 is arranged. The driving unit 11 is, for example, provided with a blower 5 and valves 6 on a base 12, a filter box 8 with a PRE filter 7 inside, an ...

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PUM

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Abstract

PURPOSE: A dust removal device and a dust removal system are provided to reduce the time for blowing off foreign materials by removing a pipe between a HEPA filter and a cleaner head. CONSTITUTION: A dust removal device(10) comprises a cleaner head(1) and a filter box(4). The filter box is detachably installed in a compressed air inlet(42) of a casing(1A) of the cleaner head and embedded with a HEPA(High Efficiency Particulate Air) filter(3). A dust removal system includes the dust removal device which is installed in a clean room, an air blower which is installed outside the clean room, and a circulation air pipe which connects the air blower and the dust removal device.

Description

technical field [0001] The invention relates to a dust removal device and a dust removal system. Background technique [0002] Generally, in the manufacture of thin displays and the like, it is necessary to particularly clean the surface of thin substrates such as glass or plastic. A method of removing extremely fine dust from a substrate surface is carried out by spraying gas from a cleaning head against a thin substrate in a so-called clean room and immediately sucking it in, and applying ultrasonic waves to the gas (for example, refer to Patent Document 1). [0003] However, in representing prior art Figure 10 And in Patent Document 1, blower 31 is arranged on the outside 33 of clean room 32, is connected by gas discharge piping 34, gas suction piping 35, and filter box 36 in the middle of gas discharge piping 34 is arranged near blower 31, clean room 32. 33 outside. [0004] If the existing Figure 10 To further explain, the gas discharged from the blower 31 usually c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D46/10
Inventor 宇泽启
Owner SHINKO