Device for improving response stability of surface acoustic wave gas sensor

A gas sensor, surface acoustic wave technology, applied in the direction of using sonic/ultrasonic/infrasonic waves to analyze fluids, etc., can solve problems such as unstable response, and achieve the effect of reducing concentration balance time, response time and desorption time

Active Publication Date: 2011-04-13
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The problem to be solved by the present invention is: how to provide a device for improving the response stability of the surface a

Method used

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  • Device for improving response stability of surface acoustic wave gas sensor
  • Device for improving response stability of surface acoustic wave gas sensor
  • Device for improving response stability of surface acoustic wave gas sensor

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Embodiment Construction

[0015] Attached below figure 1 and 2 And embodiment further describes the present invention:

[0016] The device for improving the response stability of the surface acoustic wave gas sensor includes a long strip-shaped hollow metal cover and an airtight gasket, and the metal cover is fastened on the substrate through the middle airtight gasket to form a closed metal gas The metal air chamber has an air inlet connected to the outside atmosphere and an exhaust port connected to the micro air pump; the width of the metal cover is narrower than the width of the substrate, and the width of the hollow part of the metal cover is larger than the width of the electrode, so that The electrode and the sensitive film are located in the hollow part of the metal air chamber, and the welding pad of the electrode is not covered by the metal cover and exposed outside for wire welding.

[0017] The following is a specific preparation method of the present invention:

[0018] Firstly, the SAW...

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Abstract

The invention discloses a device for improving the response stability of a surface acoustic wave gas sensor, wherein a metal cover is placed on a base plate of the surface acoustic wave gas sensor to form an gas chamber, the width of the metal cover is smaller than that of the base plate, and the hollow part of the metal cover is wider than an electrode, and the electrode and a sensitive film are ensured to be arranged in the hollow part of the metal gas chamber, therefore, the base plate can play the role of isolation when external gas is pumped in, and only can the sensitive film on the base plate adsorb gas, and adhesive on the back of the base plate can not contact with gas, thereby preventing the adhesive absorbing gas from generating stress owing to the swelling effect, and further solving the unstable response of the surface acoustic wave gas sensor caused by the stress. In addition, the metal gas chamber further has an electromagnetic shielding function, which can avoid the mutual interference among a plurality of the surface acoustic wave gas sensors. The scheme of the invention realizes the minimization of the gas chamber, and is beneficial to the shortening of the response time of the sensor.

Description

technical field [0001] The invention relates to the technical field of surface acoustic wave gas sensors, in particular to a device for improving the response stability of a surface acoustic wave gas sensor. Background technique [0002] The response of the existing surface acoustic wave gas sensors in the atmosphere to be measured at a constant concentration is usually unstable, because adhesives are used when fixing the surface acoustic wave gas sensors (or the SAW sensor is directly pasted on the circuit board Either paste the SAW sensor on a base such as TO-39 and then insert it or solder it on the circuit board). Since the adhesive is an organic substance such as epoxy and silicone rubber, it will adsorb gas, and the swelling effect caused by the adsorption will generate a large stress on the substrate of the sensor. As we all know, SAW gas sensors, like other types of SAW sensors, are also very sensitive to stress, so that the response value of SAW gas sensors cannot ...

Claims

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Application Information

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IPC IPC(8): G01N29/02
Inventor 杜晓松肖华胡佳蒋亚东
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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