How to manage the consumption of cutting inserts

Abstract

The invention provides a consumption managing method of a cutting blade in a cutting device, wherein the cutting blade can continuously perform cutting process all along. The consumption managing method of a cutting blade in a cutting device with a first and a second chuck workbenches comprises: a first cutting process, in which a wafer is held on the first chuck workbench and cut; a second cutting process, in which the wafer is held on the second chuck workbench and cut; a consumption calculating process, in which during the implementation of the second cutting process, the first chuck workbench is positioned just below a deepness detecting component, and the deepness of a cutting groove formed on the wafer is detected by the deepness detecting component, and the consumption of the cutting blade is calculated based on the detected groove deepness; and a position correcting process, in which the origin position of the cutting blade in the height direction is corrected based on the consumption of the cutting blade.

Description

technical field [0001] The present invention relates to a method of managing consumption of cutting inserts in a cutting device. Background technique [0002] Various electronic components that require precision cutting, such as semiconductor wafers, ceramics, and glass, are divided into individual chips by a cutting device called a dicing saw. In the processing of these electronic components, it is necessary to perform precise cutting in micron units, and in such processing, not only the size of the chip but also the depth of incision is important. [0003] For example, a semiconductor wafer is fixed to a dicing tape, and the cutting blade is cut into the dicing tape by about 10 to 30 μm, so that the semiconductor wafer is completely cut. The cut edge presents a jagged state like a defect. [0004] In addition, the cutting inserts used for cutting have the property of being consumed (wear) as the cutting process is performed, and it is necessary to correct the fluctuation...

AI Technical Summary

Problems solved by technology

[0010] However, even in a cutting device in which a plurality of cutting members and / or chuck tables are increased, the following problem has been found to be solved. In the adjustment method, the cutting by the cutting insert must be stopped during the adjustment, and there is still room for improvement from the viewpoint of cutting efficiency.

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