Sliding block adjustment-based air spring vibration isolator with gas-solid damping coupling effect

A technology of air springs and vibration isolators, which is applied in the direction of gas shock absorbers, springs/shock absorbers, springs, etc., to achieve the effect of improving vibration isolation performance

Inactive Publication Date: 2011-08-10
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] Considering that the vibration isolator has strong vibration, micro vibration and impact load in the vertical direction, the damping link of the air spring vibration isolator described in the above invention has obvious shortcomings

Method used

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  • Sliding block adjustment-based air spring vibration isolator with gas-solid damping coupling effect
  • Sliding block adjustment-based air spring vibration isolator with gas-solid damping coupling effect
  • Sliding block adjustment-based air spring vibration isolator with gas-solid damping coupling effect

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Embodiment Construction

[0028] Specific embodiments of the present invention are described in detail below in conjunction with accompanying drawings, as image 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 As shown, an embodiment of the air spring isolator of the present invention is shown.

[0029]The air spring vibration isolator is equipped with an inner cylinder 6 inside the outer cylinder 7, and the air spring airbag 5 is set outside the upper end of the inner cylinder 6. The outer cylinder 7 is sealed and connected with the lower end of the air spring airbag 5 through its upper end boss, and the inner cylinder 6 passes The annular cover plate 2 affixed to its upper end is sealingly connected with the upper end of the air spring air bag 5 , the air inlet 13 is arranged on the outer wall of the outer cylinder 7 , a group of throttle holes 10 arranged in a circle are arranged on the inner wall of the outer cylinder 7 , and at the lower end of the outer cylinder 7 The circular bottom plat...

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Abstract

The invention discloses a sliding block adjustment-based air spring vibration isolator with gas-solid damping coupling effect, and belongs to the field of super-precision measurement and processing. Circumferentially arranged strip-type damping fins of the vibration isolator are assembled at the bottom of an inner cylinder, sliding block sets uniformly distributed in the radial direction are assembled on the upper end face of the bottom of the inner side of an outer cylinder, a worm gear-worm device is assembled on the lower end face of the bottom of the inner side of the outer cylinder, and a throttling hole area adjusting device of cam transmission is assembled below a throttling hole on the inner wall of the outer cylinder. By using an air throttling damper and the throttling hole area adjusting device, the magnitude of the total area of the throttling hole is reasonably adjusted, and damping of optimal magnitude is provided at strong vibration and impact load in the vertical direction; and damping is provided for the vibration isolator by using the reciprocating motion of Coulomb damping and strip-type damping fins relative to the outer cylinder, the magnitude of the Coulomb damping is changed by adjusting the positions of radial sliding blocks, and the damping of the optimal magnitude is provided at strong vibration, micro vibration and impact load in the vertical direction.

Description

technical field [0001] The invention belongs to the field of ultra-precision measurement and processing, and in particular relates to an air spring vibration isolator based on the gas-solid damping coupling effect adjusted by a slider. Background technique [0002] A vibration isolation device with excellent performance is one of the key technologies for ultra-precision measurement and processing. The air spring vibration isolator has the advantages of good ultra-low frequency vibration isolation performance, high bearing capacity, low equivalent stiffness, natural frequency insensitivity to load changes, easy system implementation, and low energy consumption. With the development of ultra-precision measurement and processing technology With the development of , nanotechnology and VLSI manufacturing technology, air spring isolators have been more and more widely used. Vibration isolation of a measurement frame such as a photolithography machine that carries all exposure ele...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16F9/02F16F9/50
Inventor 谭久彬夏超王雷闻荣伟杨文国
Owner HARBIN INST OF TECH
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