Sound sensor with electromagnetic wave receiver
A sound sensor, electromagnetic wave technology, applied in the direction of sensors, electrical components, transducer circuits, etc., can solve the problem of short circuit of sound sensors, and achieve the effect of reducing the size, reducing the packaging difficulty, and improving the packaging yield.
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[0043] In order to further illustrate the technical means and effects that the present invention adopts to achieve the intended purpose of the invention, below in conjunction with the accompanying drawings and preferred embodiments, the specific implementation, structure, Features and their functions are described in detail below.
[0044] Figure 2A It is a cross-sectional embodiment diagram of an acoustic sensor 200 with an electromagnetic wave receiver 40 of the present invention. Figure 2B It is a cross-sectional embodiment diagram of another acoustic sensor 200 with an electromagnetic wave receiver 40 of the present invention. image 3 for Figure 2A The top view example diagram. Figure 4AIt is a schematic cross-sectional view of a MEMS microphone 30 of the present invention. Figure 4B It is a schematic cross-sectional view of an electromagnetic wave receiver 40 of the present invention. Figure 5 It is a cross-sectional embodiment diagram of an acoustic sensor 20...
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