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A cryopump system and a method for controlling the cryopump system

A cryopump system and cryopump technology, applied in pump control, separation methods, chemical instruments and methods, etc., can solve problems such as increased system downtime

Active Publication Date: 2015-03-25
SUMITOMO HEAVY IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As a result, there is a possibility that the downtime of the system will also increase.

Method used

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  • A cryopump system and a method for controlling the cryopump system
  • A cryopump system and a method for controlling the cryopump system
  • A cryopump system and a method for controlling the cryopump system

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Embodiment Construction

[0021] First, an outline of embodiments according to the present invention described below will be described. According to one embodiment of the present invention, there is provided a cryopump system in which a plurality of compressors are arranged in parallel. In one embodiment, at least 2 compressors are independently controlled and run simultaneously. The setpoints set for the respective compressors are adjusted at a certain frequency to equalize the operating states of the respective compressors. Thereby, it is possible to evenly share the load while suppressing deviations in the operating states of the respective compressors that may increase over time. The deviation in the operating state is caused by, for example, individual differences among the compressors. For example, it is considered that the cause may be due to individual differences in the main body of the compressor, sensors attached thereto, or other devices, or differences in the length or process of piping ...

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Abstract

A cryopump system includes: a plurality of cryopumps; a plurality of compressor units arranged to operate in parallel in accordance with a control output, respectively, to supply refrigerant gas to the plurality of cryopumps; and a cryopump controller operative to determine the control output for each of the plurality of compressor units. The cryopump controller adjusts a preset value for at least one of the compressor units, the preset value being utilized to determine the control output, so that operation statuses of the respective compressor units are substantially equalized.

Description

technical field [0001] This application claims priority based on Japanese Patent Application No. 2010-211282 filed on September 21, 2010. All the content of the application is incorporated in this specification by reference. [0002] The present invention relates to a cryopump system provided with a plurality of cryopumps and a control method thereof. Background technique [0003] In order to evacuate a large volume, multiple cryopumps are sometimes used for one volume. Furthermore, in order to evacuate each vacuum chamber of a vacuum processing apparatus having a plurality of vacuum chambers, a plurality of cryopumps may be mounted on the vacuum processing apparatus. If the number of cryopumps is small, one common compressor is provided in order to circulate the working gas through the plurality of cryopumps. In the case of a large vacuum pump system with more cryopumps, there are sometimes multiple compressors. Similarly, a cryogenic system having multiple cryogenic de...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B37/08
CPCF04B49/065F04B37/08F04B49/06H01L21/02B01D8/00F25B2600/0253F25B2600/027
Inventor 安东正道
Owner SUMITOMO HEAVY IND LTD
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