Selective detector for carbon monoxide
A carbon monoxide and oxide technology, applied in instruments, alarms, measuring devices, etc., can solve problems such as the inability to ensure reliable filtration of ethanol
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[0029] according to figure 1 The CO sensor is based on p-silicon-substrate1. In this case, the CO sensor has two similarly constructed field-effect structures arranged side by side. Here, field-effect structures are usually more figure 1 are further apart from each other as shown in the dimensions. In addition to being produced on a base body, the sensor can of course also be produced on a separate base body and be arranged adjacently on an external carrier, for example a building floor or a printed circuit board.
[0030] Field effect structures are constructed identically. The field-effect structure each has a source region 3 and a drain region 4 in the n-Si region 2 . Furthermore, a floating gate 5 is provided in a passivation layer 6 made of SiO2. The floating gate 5 is covered by a passivation layer 6 , wherein a thinned region is arranged directly above the floating gate 5 . Corresponding sensitive layers 7 , 8 are provided on the thinned regions. In this case, th...
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