Correcting device for flow system
A technology for calibrating device and flow rate, applied in measuring device, test/calibration device, liquid/fluid solid measurement, etc., can solve the problems of checking whether the constant power sensor is qualified or not, and the calculation formula of constant power sensor is complicated.
Active Publication Date: 2014-01-29
BEIJING SEVENSTAR ELECTRONICS CO LTD
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Problems solved by technology
Since the calculation formula corresponding to the circuit of the constant power sensor is relatively complicated, the current inspection method cannot really fully inspect whether the constant power sensor is qualified.
Method used
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[0030] Such as image 3 As shown, first install the constant power sensor into the mass flow controller (MFC), connect the constant power sensor and the control unit of the mass flow controller (MFC) to the computer, and connect the flow measurement unit (flowmeter) of the mass flow controller Connect with flow detection equipment;
[0031] Put the mass flow controller (MFC) equipped with a constant power sensor in the high and low temperature alternating test chamber, and then pass the mass flow controller (MFC) with nitrogen;
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The invention discloses a correcting device for a flow system, which comprises a constant power type sensor and a mass flow controller, wherein the constant power type sensor is corrected by the system according to a method which comprises the following steps of: firstly, mounting the constant power type sensor into the mass flow controller, connecting the constant power type sensor and a control unit of the mass flow controller with a computer, and connecting a flow measuring unit of the mass flow controller with a flow detecting device; placing into a high-low temperature alternating test box, and introducing nitrogen into the mass flow controller; and sending a set point instruction to the mass flow controller, and meanwhile, reading a flow value of the flow detecting device, adjusting the temperature of the high-low temperature alternating test box at random, and if the flow value is constant or is changed along with the change of temperature and a normal scope of the flow is achieved by modifying a parameter of the constant power type sensor, thus confirming the sensor as an accepted product. The correcting device can be used for detecting if the constant power type sensor meets a practical application demand.
Description
technical field [0001] The invention relates to a core component of a digital gas mass flow controller—a sensor inspection technology, in particular to a flow system correction device. Background technique [0002] Mass flow controllers (MFC) are used for precise measurement and control of gas mass flow. Its measurement and control accuracy are not affected by changes in air pressure and temperature within a certain range. [0003] Such as figure 1 As shown, the working principle and control principle of the mass flow controller (MFC) are: [0004] Including shunt 1, sensor 2, circuit board 3, regulating valve 4, etc., the measuring part of the shunt, sensor and circuit board constitutes the flow measurement unit (flow meter) of the mass flow controller, the control part of the regulating valve and the circuit board Consists of the control unit of the mass flow controller. After receiving the input setting signal, the control unit of the mass flow controller controls the...
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IPC IPC(8): G01F25/00
Inventor 杨宇赵迪王瑞吴薇蒋兴东
Owner BEIJING SEVENSTAR ELECTRONICS CO LTD